12/24/2010	9:43:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/24/2010	9:44:03 AM	Recipe started at 9:43 AM
12/24/2010	9:44:03 AM	Helium valve closed
12/24/2010	9:44:03 AM	H2 valve closed
12/24/2010	9:44:03 AM	BCl3 valve closed
12/24/2010	9:44:03 AM	PH3 valve closed
12/24/2010	9:44:03 AM	SiCl4 pre valve closed
12/24/2010	9:44:03 AM	SiCl4 post valve closed
12/24/2010	9:44:03 AM	Main Vac valve closed
12/24/2010	9:44:03 AM	Bubbler valve closed
12/24/2010	9:44:03 AM	Bypass valve opened
12/24/2010	9:44:03 AM	Helium MFC set to  0.000000
12/24/2010	9:44:03 AM	H2 MFC set to  0.000000
12/24/2010	9:44:03 AM	BCl3 MFC set to  0.000000
12/24/2010	9:44:03 AM	PHl3 MFC set to  0.000000
12/24/2010	9:44:03 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:44:03 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:44:03 AM	Tube furnace set to 0
12/24/2010	9:44:03 AM	Helium valve closed
12/24/2010	9:44:03 AM	H2 valve closed
12/24/2010	9:44:03 AM	BCl3 valve closed
12/24/2010	9:44:03 AM	PH3 valve closed
12/24/2010	9:44:03 AM	SiCl4 pre valve closed
12/24/2010	9:44:03 AM	SiCl4 post valve closed
12/24/2010	9:44:03 AM	Bubbler valve closed
12/24/2010	9:44:03 AM	Main Vac valve opened
12/24/2010	9:44:03 AM	Bypass valve opened
12/24/2010	9:44:03 AM	Helium MFC set to  0.000000
12/24/2010	9:44:03 AM	H2 MFC set to  0.000000
12/24/2010	9:44:03 AM	BCl3 MFC set to  0.000000
12/24/2010	9:44:03 AM	PHl3 MFC set to  0.000000
12/24/2010	9:44:03 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:44:03 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:44:03 AM	Tube furnace set to 0
12/24/2010	9:45:03 AM	H2 valve closed
12/24/2010	9:45:03 AM	BCl3 valve closed
12/24/2010	9:45:03 AM	PH3 valve closed
12/24/2010	9:45:03 AM	SiCl4 pre valve closed
12/24/2010	9:45:03 AM	SiCl4 post valve closed
12/24/2010	9:45:03 AM	Bubbler valve closed
12/24/2010	9:45:03 AM	Helium valve opened
12/24/2010	9:45:03 AM	Main Vac valve opened
12/24/2010	9:45:03 AM	Bypass valve opened
12/24/2010	9:45:03 AM	Helium MFC set to  100.000000
12/24/2010	9:45:03 AM	H2 MFC set to  0.000000
12/24/2010	9:45:03 AM	BCl3 MFC set to  0.000000
12/24/2010	9:45:03 AM	PHl3 MFC set to  0.000000
12/24/2010	9:45:03 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:45:03 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:45:03 AM	Tube furnace set to 0
12/24/2010	9:46:03 AM	Helium valve closed
12/24/2010	9:46:03 AM	H2 valve closed
12/24/2010	9:46:03 AM	BCl3 valve closed
12/24/2010	9:46:03 AM	PH3 valve closed
12/24/2010	9:46:03 AM	SiCl4 pre valve closed
12/24/2010	9:46:03 AM	SiCl4 post valve closed
12/24/2010	9:46:03 AM	Bubbler valve closed
12/24/2010	9:46:03 AM	Main Vac valve opened
12/24/2010	9:46:03 AM	Bypass valve opened
12/24/2010	9:46:03 AM	Helium MFC set to  0.000000
12/24/2010	9:46:03 AM	H2 MFC set to  0.000000
12/24/2010	9:46:03 AM	BCl3 MFC set to  0.000000
12/24/2010	9:46:03 AM	PHl3 MFC set to  0.000000
12/24/2010	9:46:03 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:46:03 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:46:04 AM	Tube furnace set to 0
12/24/2010	9:47:04 AM	H2 valve closed
12/24/2010	9:47:04 AM	BCl3 valve closed
12/24/2010	9:47:04 AM	PH3 valve closed
12/24/2010	9:47:04 AM	SiCl4 pre valve closed
12/24/2010	9:47:04 AM	SiCl4 post valve closed
12/24/2010	9:47:04 AM	Bubbler valve closed
12/24/2010	9:47:04 AM	Helium valve opened
12/24/2010	9:47:04 AM	Main Vac valve opened
12/24/2010	9:47:04 AM	Bypass valve opened
12/24/2010	9:47:04 AM	Helium MFC set to  100.000000
12/24/2010	9:47:04 AM	H2 MFC set to  0.000000
12/24/2010	9:47:04 AM	BCl3 MFC set to  0.000000
12/24/2010	9:47:04 AM	PHl3 MFC set to  0.000000
12/24/2010	9:47:04 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:47:04 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:47:04 AM	Tube furnace set to 0
12/24/2010	9:48:04 AM	Helium valve closed
12/24/2010	9:48:04 AM	H2 valve closed
12/24/2010	9:48:04 AM	BCl3 valve closed
12/24/2010	9:48:04 AM	PH3 valve closed
12/24/2010	9:48:04 AM	SiCl4 pre valve closed
12/24/2010	9:48:04 AM	SiCl4 post valve closed
12/24/2010	9:48:04 AM	Bubbler valve closed
12/24/2010	9:48:04 AM	Main Vac valve opened
12/24/2010	9:48:04 AM	Bypass valve opened
12/24/2010	9:48:04 AM	Helium MFC set to  0.000000
12/24/2010	9:48:04 AM	H2 MFC set to  0.000000
12/24/2010	9:48:04 AM	BCl3 MFC set to  0.000000
12/24/2010	9:48:04 AM	PHl3 MFC set to  0.000000
12/24/2010	9:48:04 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:48:04 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:48:04 AM	Tube furnace set to 0
12/24/2010	9:49:04 AM	H2 valve closed
12/24/2010	9:49:04 AM	BCl3 valve closed
12/24/2010	9:49:04 AM	PH3 valve closed
12/24/2010	9:49:04 AM	SiCl4 pre valve closed
12/24/2010	9:49:04 AM	SiCl4 post valve closed
12/24/2010	9:49:04 AM	Bubbler valve closed
12/24/2010	9:49:04 AM	Helium valve opened
12/24/2010	9:49:04 AM	Main Vac valve opened
12/24/2010	9:49:04 AM	Bypass valve opened
12/24/2010	9:49:04 AM	Helium MFC set to  100.000000
12/24/2010	9:49:04 AM	H2 MFC set to  0.000000
12/24/2010	9:49:04 AM	BCl3 MFC set to  0.000000
12/24/2010	9:49:04 AM	PHl3 MFC set to  0.000000
12/24/2010	9:49:04 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:49:04 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:49:04 AM	Tube furnace set to 0
12/24/2010	9:50:04 AM	Helium valve closed
12/24/2010	9:50:04 AM	H2 valve closed
12/24/2010	9:50:04 AM	BCl3 valve closed
12/24/2010	9:50:04 AM	PH3 valve closed
12/24/2010	9:50:04 AM	SiCl4 pre valve closed
12/24/2010	9:50:04 AM	SiCl4 post valve closed
12/24/2010	9:50:04 AM	Bubbler valve closed
12/24/2010	9:50:04 AM	Main Vac valve opened
12/24/2010	9:50:04 AM	Bypass valve opened
12/24/2010	9:50:04 AM	Helium MFC set to  0.000000
12/24/2010	9:50:04 AM	H2 MFC set to  0.000000
12/24/2010	9:50:04 AM	BCl3 MFC set to  0.000000
12/24/2010	9:50:04 AM	PHl3 MFC set to  0.000000
12/24/2010	9:50:04 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:50:04 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:50:04 AM	Tube furnace set to 0
12/24/2010	9:51:04 AM	H2 valve closed
12/24/2010	9:51:04 AM	BCl3 valve closed
12/24/2010	9:51:04 AM	PH3 valve closed
12/24/2010	9:51:04 AM	SiCl4 pre valve closed
12/24/2010	9:51:04 AM	SiCl4 post valve closed
12/24/2010	9:51:04 AM	Bubbler valve closed
12/24/2010	9:51:04 AM	Helium valve opened
12/24/2010	9:51:04 AM	Main Vac valve opened
12/24/2010	9:51:04 AM	Bypass valve opened
12/24/2010	9:51:04 AM	Helium MFC set to  100.000000
12/24/2010	9:51:04 AM	H2 MFC set to  0.000000
12/24/2010	9:51:04 AM	BCl3 MFC set to  0.000000
12/24/2010	9:51:04 AM	PHl3 MFC set to  0.000000
12/24/2010	9:51:04 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:51:04 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:51:05 AM	Tube furnace set to 0
12/24/2010	9:52:05 AM	Helium valve closed
12/24/2010	9:52:05 AM	H2 valve closed
12/24/2010	9:52:05 AM	BCl3 valve closed
12/24/2010	9:52:05 AM	PH3 valve closed
12/24/2010	9:52:05 AM	SiCl4 pre valve closed
12/24/2010	9:52:05 AM	SiCl4 post valve closed
12/24/2010	9:52:05 AM	Bubbler valve closed
12/24/2010	9:52:05 AM	Main Vac valve opened
12/24/2010	9:52:05 AM	Bypass valve opened
12/24/2010	9:52:05 AM	Helium MFC set to  0.000000
12/24/2010	9:52:05 AM	H2 MFC set to  0.000000
12/24/2010	9:52:05 AM	BCl3 MFC set to  0.000000
12/24/2010	9:52:05 AM	PHl3 MFC set to  0.000000
12/24/2010	9:52:05 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:52:05 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:52:05 AM	Tube furnace set to 0
12/24/2010	9:53:05 AM	H2 valve closed
12/24/2010	9:53:05 AM	BCl3 valve closed
12/24/2010	9:53:05 AM	PH3 valve closed
12/24/2010	9:53:05 AM	SiCl4 pre valve closed
12/24/2010	9:53:05 AM	SiCl4 post valve closed
12/24/2010	9:53:05 AM	Bubbler valve closed
12/24/2010	9:53:05 AM	Helium valve opened
12/24/2010	9:53:05 AM	Main Vac valve opened
12/24/2010	9:53:05 AM	Bypass valve opened
12/24/2010	9:53:05 AM	Helium MFC set to  100.000000
12/24/2010	9:53:05 AM	H2 MFC set to  0.000000
12/24/2010	9:53:05 AM	BCl3 MFC set to  0.000000
12/24/2010	9:53:05 AM	PHl3 MFC set to  0.000000
12/24/2010	9:53:05 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:53:05 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:53:05 AM	Tube furnace set to 0
12/24/2010	9:54:05 AM	Helium valve closed
12/24/2010	9:54:05 AM	H2 valve closed
12/24/2010	9:54:05 AM	BCl3 valve closed
12/24/2010	9:54:05 AM	PH3 valve closed
12/24/2010	9:54:05 AM	SiCl4 pre valve closed
12/24/2010	9:54:05 AM	SiCl4 post valve closed
12/24/2010	9:54:05 AM	Bubbler valve closed
12/24/2010	9:54:05 AM	Main Vac valve opened
12/24/2010	9:54:05 AM	Bypass valve opened
12/24/2010	9:54:05 AM	Helium MFC set to  0.000000
12/24/2010	9:54:05 AM	H2 MFC set to  0.000000
12/24/2010	9:54:05 AM	BCl3 MFC set to  0.000000
12/24/2010	9:54:05 AM	PHl3 MFC set to  0.000000
12/24/2010	9:54:05 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:54:05 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:54:05 AM	Tube furnace set to 0
12/24/2010	9:55:05 AM	H2 valve closed
12/24/2010	9:55:05 AM	BCl3 valve closed
12/24/2010	9:55:05 AM	PH3 valve closed
12/24/2010	9:55:05 AM	SiCl4 pre valve closed
12/24/2010	9:55:05 AM	SiCl4 post valve closed
12/24/2010	9:55:05 AM	Bubbler valve closed
12/24/2010	9:55:05 AM	Helium valve opened
12/24/2010	9:55:05 AM	Main Vac valve opened
12/24/2010	9:55:05 AM	Bypass valve opened
12/24/2010	9:55:05 AM	Helium MFC set to  100.000000
12/24/2010	9:55:05 AM	H2 MFC set to  0.000000
12/24/2010	9:55:05 AM	BCl3 MFC set to  0.000000
12/24/2010	9:55:05 AM	PHl3 MFC set to  0.000000
12/24/2010	9:55:05 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:55:05 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:55:05 AM	Tube furnace set to 0
12/24/2010	9:56:05 AM	Helium valve closed
12/24/2010	9:56:05 AM	H2 valve closed
12/24/2010	9:56:05 AM	BCl3 valve closed
12/24/2010	9:56:05 AM	PH3 valve closed
12/24/2010	9:56:05 AM	SiCl4 pre valve closed
12/24/2010	9:56:05 AM	SiCl4 post valve closed
12/24/2010	9:56:05 AM	Bubbler valve closed
12/24/2010	9:56:05 AM	Main Vac valve opened
12/24/2010	9:56:05 AM	Bypass valve opened
12/24/2010	9:56:05 AM	Helium MFC set to  0.000000
12/24/2010	9:56:05 AM	H2 MFC set to  0.000000
12/24/2010	9:56:05 AM	BCl3 MFC set to  0.000000
12/24/2010	9:56:05 AM	PHl3 MFC set to  0.000000
12/24/2010	9:56:05 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:56:05 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:56:06 AM	Tube furnace set to 0
12/24/2010	9:56:17 AM	Run aborted at 9:56 AM
12/24/2010	9:56:17 AM	Helium valve closed
12/24/2010	9:56:17 AM	H2 valve closed
12/24/2010	9:56:17 AM	BCl3 valve closed
12/24/2010	9:56:17 AM	PH3 valve closed
12/24/2010	9:56:17 AM	SiCl4 pre valve closed
12/24/2010	9:56:17 AM	SiCl4 post valve closed
12/24/2010	9:56:17 AM	Bypass valve closed
12/24/2010	9:56:17 AM	Main Vac valve closed
12/24/2010	9:56:17 AM	Bubbler valve closed
12/24/2010	9:56:17 AM	Helium MFC set to  0.000000
12/24/2010	9:56:17 AM	H2 MFC set to  0.000000
12/24/2010	9:56:17 AM	BCl3 MFC set to  0.000000
12/24/2010	9:56:17 AM	PHl3 MFC set to  0.000000
12/24/2010	9:56:17 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:56:18 AM	Tube furnace set to 0
12/24/2010	9:56:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/24/2010	9:56:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/24/2010	9:56:20 AM	Recipe started at 9:56 AM
12/24/2010	9:56:20 AM	Helium valve closed
12/24/2010	9:56:20 AM	H2 valve closed
12/24/2010	9:56:20 AM	BCl3 valve closed
12/24/2010	9:56:20 AM	PH3 valve closed
12/24/2010	9:56:20 AM	SiCl4 pre valve closed
12/24/2010	9:56:20 AM	SiCl4 post valve closed
12/24/2010	9:56:20 AM	Main Vac valve closed
12/24/2010	9:56:20 AM	Bubbler valve closed
12/24/2010	9:56:20 AM	Bypass valve opened
12/24/2010	9:56:20 AM	Helium MFC set to  0.000000
12/24/2010	9:56:20 AM	H2 MFC set to  0.000000
12/24/2010	9:56:20 AM	BCl3 MFC set to  0.000000
12/24/2010	9:56:20 AM	PHl3 MFC set to  0.000000
12/24/2010	9:56:20 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:56:20 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:56:20 AM	Tube furnace set to 0
12/24/2010	9:56:20 AM	Helium valve closed
12/24/2010	9:56:20 AM	H2 valve closed
12/24/2010	9:56:20 AM	BCl3 valve closed
12/24/2010	9:56:20 AM	PH3 valve closed
12/24/2010	9:56:20 AM	SiCl4 pre valve closed
12/24/2010	9:56:20 AM	SiCl4 post valve closed
12/24/2010	9:56:20 AM	Bubbler valve closed
12/24/2010	9:56:20 AM	Main Vac valve opened
12/24/2010	9:56:20 AM	Bypass valve opened
12/24/2010	9:56:20 AM	Helium MFC set to  0.000000
12/24/2010	9:56:20 AM	H2 MFC set to  0.000000
12/24/2010	9:56:20 AM	BCl3 MFC set to  0.000000
12/24/2010	9:56:20 AM	PHl3 MFC set to  0.000000
12/24/2010	9:56:20 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:56:20 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:56:20 AM	Tube furnace set to 0
12/24/2010	9:56:21 AM	Run finished at 9:56 AM
12/24/2010	9:56:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/24/2010	9:57:26 AM	Bypass valve closed
12/24/2010	9:57:27 AM	Main Vac valve closed
12/24/2010	9:57:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/24/2010	9:57:37 AM	Recipe started at 9:57 AM
12/24/2010	9:57:37 AM	Helium valve closed
12/24/2010	9:57:37 AM	H2 valve closed
12/24/2010	9:57:37 AM	BCl3 valve closed
12/24/2010	9:57:37 AM	PH3 valve closed
12/24/2010	9:57:37 AM	SiCl4 pre valve closed
12/24/2010	9:57:37 AM	SiCl4 post valve closed
12/24/2010	9:57:37 AM	Main Vac valve closed
12/24/2010	9:57:37 AM	Bubbler valve closed
12/24/2010	9:57:37 AM	Bypass valve opened
12/24/2010	9:57:37 AM	Helium MFC set to  0.000000
12/24/2010	9:57:37 AM	H2 MFC set to  0.000000
12/24/2010	9:57:37 AM	BCl3 MFC set to  0.000000
12/24/2010	9:57:37 AM	PHl3 MFC set to  0.000000
12/24/2010	9:57:37 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:57:37 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:57:38 AM	Tube furnace set to 0
12/24/2010	9:57:38 AM	Helium valve closed
12/24/2010	9:57:38 AM	H2 valve closed
12/24/2010	9:57:38 AM	BCl3 valve closed
12/24/2010	9:57:38 AM	PH3 valve closed
12/24/2010	9:57:38 AM	SiCl4 pre valve closed
12/24/2010	9:57:38 AM	SiCl4 post valve closed
12/24/2010	9:57:38 AM	Bubbler valve closed
12/24/2010	9:57:38 AM	Main Vac valve opened
12/24/2010	9:57:38 AM	Bypass valve opened
12/24/2010	9:57:38 AM	Helium MFC set to  0.000000
12/24/2010	9:57:38 AM	H2 MFC set to  0.000000
12/24/2010	9:57:38 AM	BCl3 MFC set to  0.000000
12/24/2010	9:57:38 AM	PHl3 MFC set to  0.000000
12/24/2010	9:57:38 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:57:38 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:57:38 AM	Tube furnace set to 0
12/24/2010	9:57:38 AM	Run finished at 9:57 AM
12/24/2010	9:57:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/24/2010	9:58:08 AM	Recipe started at 9:58 AM
12/24/2010	9:58:08 AM	Helium valve closed
12/24/2010	9:58:08 AM	BCl3 valve closed
12/24/2010	9:58:08 AM	PH3 valve closed
12/24/2010	9:58:08 AM	SiCl4 pre valve closed
12/24/2010	9:58:08 AM	SiCl4 post valve closed
12/24/2010	9:58:08 AM	Main Vac valve closed
12/24/2010	9:58:08 AM	Bypass valve closed
12/24/2010	9:58:08 AM	Bubbler valve closed
12/24/2010	9:58:08 AM	H2 valve opened
12/24/2010	9:58:08 AM	Helium MFC set to  0.000000
12/24/2010	9:58:08 AM	H2 MFC set to  500.000000
12/24/2010	9:58:08 AM	BCl3 MFC set to  0.000000
12/24/2010	9:58:08 AM	PHl3 MFC set to  0.000000
12/24/2010	9:58:08 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:58:08 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:58:09 AM	Tube furnace set to 0
12/24/2010	9:59:31 AM	Helium valve closed
12/24/2010	9:59:31 AM	BCl3 valve closed
12/24/2010	9:59:31 AM	PH3 valve closed
12/24/2010	9:59:31 AM	SiCl4 pre valve closed
12/24/2010	9:59:31 AM	SiCl4 post valve closed
12/24/2010	9:59:31 AM	Main Vac valve closed
12/24/2010	9:59:31 AM	Bypass valve closed
12/24/2010	9:59:31 AM	H2 valve opened
12/24/2010	9:59:31 AM	Bubbler valve opened
12/24/2010	9:59:31 AM	Helium MFC set to  0.000000
12/24/2010	9:59:31 AM	H2 MFC set to  500.000000
12/24/2010	9:59:31 AM	BCl3 MFC set to  0.000000
12/24/2010	9:59:31 AM	PHl3 MFC set to  0.000000
12/24/2010	9:59:31 AM	SiCl4 MFC set to  0.000000
12/24/2010	9:59:31 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	9:59:31 AM	Tube furnace set to 1000
12/24/2010	10:19:31 AM	Helium valve closed
12/24/2010	10:19:31 AM	PH3 valve closed
12/24/2010	10:19:31 AM	Main Vac valve closed
12/24/2010	10:19:31 AM	Bypass valve closed
12/24/2010	10:19:31 AM	H2 valve opened
12/24/2010	10:19:31 AM	BCl3 valve opened
12/24/2010	10:19:31 AM	SiCl4 pre valve opened
12/24/2010	10:19:31 AM	SiCl4 post valve opened
12/24/2010	10:19:31 AM	Bubbler valve opened
12/24/2010	10:19:31 AM	Helium MFC set to  0.000000
12/24/2010	10:19:31 AM	H2 MFC set to  500.000000
12/24/2010	10:19:31 AM	BCl3 MFC set to  12.000000
12/24/2010	10:19:31 AM	PHl3 MFC set to  0.000000
12/24/2010	10:19:31 AM	SiCl4 MFC set to  50.000000
12/24/2010	10:19:31 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	10:19:31 AM	Tube furnace set to 1000
12/24/2010	10:39:31 AM	H2 valve closed
12/24/2010	10:39:31 AM	BCl3 valve closed
12/24/2010	10:39:31 AM	PH3 valve closed
12/24/2010	10:39:31 AM	SiCl4 pre valve closed
12/24/2010	10:39:31 AM	SiCl4 post valve closed
12/24/2010	10:39:31 AM	Main Vac valve closed
12/24/2010	10:39:31 AM	Bypass valve closed
12/24/2010	10:39:31 AM	Helium valve opened
12/24/2010	10:39:31 AM	Bubbler valve opened
12/24/2010	10:39:31 AM	Helium MFC set to  500.000000
12/24/2010	10:39:31 AM	H2 MFC set to  0.000000
12/24/2010	10:39:31 AM	BCl3 MFC set to  0.000000
12/24/2010	10:39:31 AM	PHl3 MFC set to  0.000000
12/24/2010	10:39:31 AM	SiCl4 MFC set to  0.000000
12/24/2010	10:39:31 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	10:39:31 AM	Tube furnace set to 0
12/24/2010	10:59:31 AM	Helium valve closed
12/24/2010	10:59:31 AM	H2 valve closed
12/24/2010	10:59:31 AM	BCl3 valve closed
12/24/2010	10:59:31 AM	PH3 valve closed
12/24/2010	10:59:31 AM	SiCl4 pre valve closed
12/24/2010	10:59:31 AM	SiCl4 post valve closed
12/24/2010	10:59:31 AM	Main Vac valve closed
12/24/2010	10:59:31 AM	Bypass valve closed
12/24/2010	10:59:31 AM	Bubbler valve closed
12/24/2010	10:59:31 AM	Helium MFC set to  0.000000
12/24/2010	10:59:31 AM	H2 MFC set to  0.000000
12/24/2010	10:59:31 AM	BCl3 MFC set to  0.000000
12/24/2010	10:59:31 AM	PHl3 MFC set to  0.000000
12/24/2010	10:59:31 AM	SiCl4 MFC set to  0.000000
12/24/2010	10:59:31 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	10:59:31 AM	Tube furnace set to 0
12/24/2010	10:59:32 AM	Run finished at 10:59 AM
12/24/2010	11:13:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/24/2010	11:13:41 AM	Recipe started at 11:13 AM
12/24/2010	11:13:41 AM	Helium valve closed
12/24/2010	11:13:41 AM	H2 valve closed
12/24/2010	11:13:41 AM	BCl3 valve closed
12/24/2010	11:13:41 AM	PH3 valve closed
12/24/2010	11:13:41 AM	SiCl4 pre valve closed
12/24/2010	11:13:41 AM	SiCl4 post valve closed
12/24/2010	11:13:41 AM	Main Vac valve closed
12/24/2010	11:13:41 AM	Bubbler valve closed
12/24/2010	11:13:41 AM	Bypass valve opened
12/24/2010	11:13:41 AM	Helium MFC set to  0.000000
12/24/2010	11:13:41 AM	H2 MFC set to  0.000000
12/24/2010	11:13:41 AM	BCl3 MFC set to  0.000000
12/24/2010	11:13:41 AM	PHl3 MFC set to  0.000000
12/24/2010	11:13:41 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:13:41 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:13:41 AM	Tube furnace set to 0
12/24/2010	11:14:37 AM	Helium valve closed
12/24/2010	11:14:37 AM	H2 valve closed
12/24/2010	11:14:37 AM	BCl3 valve closed
12/24/2010	11:14:37 AM	PH3 valve closed
12/24/2010	11:14:37 AM	SiCl4 pre valve closed
12/24/2010	11:14:37 AM	SiCl4 post valve closed
12/24/2010	11:14:37 AM	Bubbler valve closed
12/24/2010	11:14:37 AM	Main Vac valve opened
12/24/2010	11:14:37 AM	Bypass valve opened
12/24/2010	11:14:37 AM	Helium MFC set to  0.000000
12/24/2010	11:14:37 AM	H2 MFC set to  0.000000
12/24/2010	11:14:37 AM	BCl3 MFC set to  0.000000
12/24/2010	11:14:37 AM	PHl3 MFC set to  0.000000
12/24/2010	11:14:37 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:14:37 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:14:37 AM	Tube furnace set to 0
12/24/2010	11:14:37 AM	Run finished at 11:14 AM
12/24/2010	11:14:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/24/2010	11:14:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/24/2010	11:14:55 AM	Recipe started at 11:14 AM
12/24/2010	11:14:55 AM	Helium valve closed
12/24/2010	11:14:55 AM	H2 valve closed
12/24/2010	11:14:55 AM	BCl3 valve closed
12/24/2010	11:14:55 AM	PH3 valve closed
12/24/2010	11:14:55 AM	SiCl4 pre valve closed
12/24/2010	11:14:55 AM	SiCl4 post valve closed
12/24/2010	11:14:55 AM	Main Vac valve closed
12/24/2010	11:14:55 AM	Bubbler valve closed
12/24/2010	11:14:55 AM	Bypass valve opened
12/24/2010	11:14:55 AM	Helium MFC set to  0.000000
12/24/2010	11:14:55 AM	H2 MFC set to  0.000000
12/24/2010	11:14:55 AM	BCl3 MFC set to  0.000000
12/24/2010	11:14:55 AM	PHl3 MFC set to  0.000000
12/24/2010	11:14:55 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:14:55 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:14:56 AM	Tube furnace set to 0
12/24/2010	11:14:56 AM	Helium valve closed
12/24/2010	11:14:56 AM	H2 valve closed
12/24/2010	11:14:56 AM	BCl3 valve closed
12/24/2010	11:14:56 AM	PH3 valve closed
12/24/2010	11:14:56 AM	SiCl4 pre valve closed
12/24/2010	11:14:56 AM	SiCl4 post valve closed
12/24/2010	11:14:56 AM	Bubbler valve closed
12/24/2010	11:14:56 AM	Main Vac valve opened
12/24/2010	11:14:56 AM	Bypass valve opened
12/24/2010	11:14:56 AM	Helium MFC set to  0.000000
12/24/2010	11:14:56 AM	H2 MFC set to  0.000000
12/24/2010	11:14:56 AM	BCl3 MFC set to  0.000000
12/24/2010	11:14:56 AM	PHl3 MFC set to  0.000000
12/24/2010	11:14:56 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:14:56 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:14:56 AM	Tube furnace set to 0
12/24/2010	11:15:56 AM	H2 valve closed
12/24/2010	11:15:56 AM	BCl3 valve closed
12/24/2010	11:15:56 AM	PH3 valve closed
12/24/2010	11:15:56 AM	SiCl4 pre valve closed
12/24/2010	11:15:56 AM	SiCl4 post valve closed
12/24/2010	11:15:56 AM	Bubbler valve closed
12/24/2010	11:15:56 AM	Helium valve opened
12/24/2010	11:15:56 AM	Main Vac valve opened
12/24/2010	11:15:56 AM	Bypass valve opened
12/24/2010	11:15:56 AM	Helium MFC set to  100.000000
12/24/2010	11:15:56 AM	H2 MFC set to  0.000000
12/24/2010	11:15:56 AM	BCl3 MFC set to  0.000000
12/24/2010	11:15:56 AM	PHl3 MFC set to  0.000000
12/24/2010	11:15:56 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:15:56 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:15:56 AM	Tube furnace set to 0
12/24/2010	11:16:56 AM	Helium valve closed
12/24/2010	11:16:56 AM	H2 valve closed
12/24/2010	11:16:56 AM	BCl3 valve closed
12/24/2010	11:16:56 AM	PH3 valve closed
12/24/2010	11:16:56 AM	SiCl4 pre valve closed
12/24/2010	11:16:56 AM	SiCl4 post valve closed
12/24/2010	11:16:56 AM	Bubbler valve closed
12/24/2010	11:16:56 AM	Main Vac valve opened
12/24/2010	11:16:56 AM	Bypass valve opened
12/24/2010	11:16:56 AM	Helium MFC set to  0.000000
12/24/2010	11:16:56 AM	H2 MFC set to  0.000000
12/24/2010	11:16:56 AM	BCl3 MFC set to  0.000000
12/24/2010	11:16:56 AM	PHl3 MFC set to  0.000000
12/24/2010	11:16:56 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:16:56 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:16:56 AM	Tube furnace set to 0
12/24/2010	11:17:56 AM	H2 valve closed
12/24/2010	11:17:56 AM	BCl3 valve closed
12/24/2010	11:17:56 AM	PH3 valve closed
12/24/2010	11:17:56 AM	SiCl4 pre valve closed
12/24/2010	11:17:56 AM	SiCl4 post valve closed
12/24/2010	11:17:56 AM	Bubbler valve closed
12/24/2010	11:17:56 AM	Helium valve opened
12/24/2010	11:17:56 AM	Main Vac valve opened
12/24/2010	11:17:56 AM	Bypass valve opened
12/24/2010	11:17:56 AM	Helium MFC set to  100.000000
12/24/2010	11:17:56 AM	H2 MFC set to  0.000000
12/24/2010	11:17:56 AM	BCl3 MFC set to  0.000000
12/24/2010	11:17:56 AM	PHl3 MFC set to  0.000000
12/24/2010	11:17:56 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:17:56 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:17:57 AM	Tube furnace set to 0
12/24/2010	11:18:57 AM	Helium valve closed
12/24/2010	11:18:57 AM	H2 valve closed
12/24/2010	11:18:57 AM	BCl3 valve closed
12/24/2010	11:18:57 AM	PH3 valve closed
12/24/2010	11:18:57 AM	SiCl4 pre valve closed
12/24/2010	11:18:57 AM	SiCl4 post valve closed
12/24/2010	11:18:57 AM	Bubbler valve closed
12/24/2010	11:18:57 AM	Main Vac valve opened
12/24/2010	11:18:57 AM	Bypass valve opened
12/24/2010	11:18:57 AM	Helium MFC set to  0.000000
12/24/2010	11:18:57 AM	H2 MFC set to  0.000000
12/24/2010	11:18:57 AM	BCl3 MFC set to  0.000000
12/24/2010	11:18:57 AM	PHl3 MFC set to  0.000000
12/24/2010	11:18:57 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:18:57 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:18:57 AM	Tube furnace set to 0
12/24/2010	11:19:57 AM	H2 valve closed
12/24/2010	11:19:57 AM	BCl3 valve closed
12/24/2010	11:19:57 AM	PH3 valve closed
12/24/2010	11:19:57 AM	SiCl4 pre valve closed
12/24/2010	11:19:57 AM	SiCl4 post valve closed
12/24/2010	11:19:57 AM	Bubbler valve closed
12/24/2010	11:19:57 AM	Helium valve opened
12/24/2010	11:19:57 AM	Main Vac valve opened
12/24/2010	11:19:57 AM	Bypass valve opened
12/24/2010	11:19:57 AM	Helium MFC set to  100.000000
12/24/2010	11:19:57 AM	H2 MFC set to  0.000000
12/24/2010	11:19:57 AM	BCl3 MFC set to  0.000000
12/24/2010	11:19:57 AM	PHl3 MFC set to  0.000000
12/24/2010	11:19:57 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:19:57 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:19:57 AM	Tube furnace set to 0
12/24/2010	11:20:57 AM	Helium valve closed
12/24/2010	11:20:57 AM	H2 valve closed
12/24/2010	11:20:57 AM	BCl3 valve closed
12/24/2010	11:20:57 AM	PH3 valve closed
12/24/2010	11:20:57 AM	SiCl4 pre valve closed
12/24/2010	11:20:57 AM	SiCl4 post valve closed
12/24/2010	11:20:57 AM	Bubbler valve closed
12/24/2010	11:20:57 AM	Main Vac valve opened
12/24/2010	11:20:57 AM	Bypass valve opened
12/24/2010	11:20:57 AM	Helium MFC set to  0.000000
12/24/2010	11:20:57 AM	H2 MFC set to  0.000000
12/24/2010	11:20:57 AM	BCl3 MFC set to  0.000000
12/24/2010	11:20:57 AM	PHl3 MFC set to  0.000000
12/24/2010	11:20:57 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:20:57 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:20:57 AM	Tube furnace set to 0
12/24/2010	11:21:57 AM	H2 valve closed
12/24/2010	11:21:57 AM	BCl3 valve closed
12/24/2010	11:21:57 AM	PH3 valve closed
12/24/2010	11:21:57 AM	SiCl4 pre valve closed
12/24/2010	11:21:57 AM	SiCl4 post valve closed
12/24/2010	11:21:57 AM	Bubbler valve closed
12/24/2010	11:21:57 AM	Helium valve opened
12/24/2010	11:21:57 AM	Main Vac valve opened
12/24/2010	11:21:57 AM	Bypass valve opened
12/24/2010	11:21:57 AM	Helium MFC set to  100.000000
12/24/2010	11:21:57 AM	H2 MFC set to  0.000000
12/24/2010	11:21:57 AM	BCl3 MFC set to  0.000000
12/24/2010	11:21:57 AM	PHl3 MFC set to  0.000000
12/24/2010	11:21:57 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:21:57 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:21:57 AM	Tube furnace set to 0
12/24/2010	11:22:57 AM	Helium valve closed
12/24/2010	11:22:57 AM	H2 valve closed
12/24/2010	11:22:57 AM	BCl3 valve closed
12/24/2010	11:22:57 AM	PH3 valve closed
12/24/2010	11:22:57 AM	SiCl4 pre valve closed
12/24/2010	11:22:57 AM	SiCl4 post valve closed
12/24/2010	11:22:57 AM	Bubbler valve closed
12/24/2010	11:22:57 AM	Main Vac valve opened
12/24/2010	11:22:57 AM	Bypass valve opened
12/24/2010	11:22:57 AM	Helium MFC set to  0.000000
12/24/2010	11:22:57 AM	H2 MFC set to  0.000000
12/24/2010	11:22:57 AM	BCl3 MFC set to  0.000000
12/24/2010	11:22:57 AM	PHl3 MFC set to  0.000000
12/24/2010	11:22:57 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:22:57 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:22:58 AM	Tube furnace set to 0
12/24/2010	11:23:58 AM	H2 valve closed
12/24/2010	11:23:58 AM	BCl3 valve closed
12/24/2010	11:23:58 AM	PH3 valve closed
12/24/2010	11:23:58 AM	SiCl4 pre valve closed
12/24/2010	11:23:58 AM	SiCl4 post valve closed
12/24/2010	11:23:58 AM	Bubbler valve closed
12/24/2010	11:23:58 AM	Helium valve opened
12/24/2010	11:23:58 AM	Main Vac valve opened
12/24/2010	11:23:58 AM	Bypass valve opened
12/24/2010	11:23:58 AM	Helium MFC set to  100.000000
12/24/2010	11:23:58 AM	H2 MFC set to  0.000000
12/24/2010	11:23:58 AM	BCl3 MFC set to  0.000000
12/24/2010	11:23:58 AM	PHl3 MFC set to  0.000000
12/24/2010	11:23:58 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:23:58 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:23:58 AM	Tube furnace set to 0
12/24/2010	11:24:58 AM	Helium valve closed
12/24/2010	11:24:58 AM	H2 valve closed
12/24/2010	11:24:58 AM	BCl3 valve closed
12/24/2010	11:24:58 AM	PH3 valve closed
12/24/2010	11:24:58 AM	SiCl4 pre valve closed
12/24/2010	11:24:58 AM	SiCl4 post valve closed
12/24/2010	11:24:58 AM	Bubbler valve closed
12/24/2010	11:24:58 AM	Main Vac valve opened
12/24/2010	11:24:58 AM	Bypass valve opened
12/24/2010	11:24:58 AM	Helium MFC set to  0.000000
12/24/2010	11:24:58 AM	H2 MFC set to  0.000000
12/24/2010	11:24:58 AM	BCl3 MFC set to  0.000000
12/24/2010	11:24:58 AM	PHl3 MFC set to  0.000000
12/24/2010	11:24:58 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:24:58 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:24:58 AM	Tube furnace set to 0
12/24/2010	11:25:58 AM	H2 valve closed
12/24/2010	11:25:58 AM	BCl3 valve closed
12/24/2010	11:25:58 AM	PH3 valve closed
12/24/2010	11:25:58 AM	SiCl4 pre valve closed
12/24/2010	11:25:58 AM	SiCl4 post valve closed
12/24/2010	11:25:58 AM	Bubbler valve closed
12/24/2010	11:25:58 AM	Helium valve opened
12/24/2010	11:25:58 AM	Main Vac valve opened
12/24/2010	11:25:58 AM	Bypass valve opened
12/24/2010	11:25:58 AM	Helium MFC set to  100.000000
12/24/2010	11:25:58 AM	H2 MFC set to  0.000000
12/24/2010	11:25:58 AM	BCl3 MFC set to  0.000000
12/24/2010	11:25:58 AM	PHl3 MFC set to  0.000000
12/24/2010	11:25:58 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:25:58 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:25:58 AM	Tube furnace set to 0
12/24/2010	11:26:58 AM	Helium valve closed
12/24/2010	11:26:58 AM	H2 valve closed
12/24/2010	11:26:58 AM	BCl3 valve closed
12/24/2010	11:26:58 AM	PH3 valve closed
12/24/2010	11:26:58 AM	SiCl4 pre valve closed
12/24/2010	11:26:58 AM	SiCl4 post valve closed
12/24/2010	11:26:58 AM	Bubbler valve closed
12/24/2010	11:26:58 AM	Main Vac valve opened
12/24/2010	11:26:58 AM	Bypass valve opened
12/24/2010	11:26:58 AM	Helium MFC set to  0.000000
12/24/2010	11:26:58 AM	H2 MFC set to  0.000000
12/24/2010	11:26:58 AM	BCl3 MFC set to  0.000000
12/24/2010	11:26:58 AM	PHl3 MFC set to  0.000000
12/24/2010	11:26:58 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:26:58 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:26:58 AM	Tube furnace set to 0
12/24/2010	11:27:58 AM	H2 valve closed
12/24/2010	11:27:58 AM	BCl3 valve closed
12/24/2010	11:27:58 AM	PH3 valve closed
12/24/2010	11:27:58 AM	SiCl4 pre valve closed
12/24/2010	11:27:58 AM	SiCl4 post valve closed
12/24/2010	11:27:58 AM	Bubbler valve closed
12/24/2010	11:27:58 AM	Helium valve opened
12/24/2010	11:27:58 AM	Main Vac valve opened
12/24/2010	11:27:58 AM	Bypass valve opened
12/24/2010	11:27:58 AM	Helium MFC set to  100.000000
12/24/2010	11:27:58 AM	H2 MFC set to  0.000000
12/24/2010	11:27:58 AM	BCl3 MFC set to  0.000000
12/24/2010	11:27:58 AM	PHl3 MFC set to  0.000000
12/24/2010	11:27:58 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:27:58 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:27:59 AM	Tube furnace set to 0
12/24/2010	11:28:59 AM	Helium valve closed
12/24/2010	11:28:59 AM	H2 valve closed
12/24/2010	11:28:59 AM	BCl3 valve closed
12/24/2010	11:28:59 AM	PH3 valve closed
12/24/2010	11:28:59 AM	SiCl4 pre valve closed
12/24/2010	11:28:59 AM	SiCl4 post valve closed
12/24/2010	11:28:59 AM	Bubbler valve closed
12/24/2010	11:28:59 AM	Main Vac valve opened
12/24/2010	11:28:59 AM	Bypass valve opened
12/24/2010	11:28:59 AM	Helium MFC set to  0.000000
12/24/2010	11:28:59 AM	H2 MFC set to  0.000000
12/24/2010	11:28:59 AM	BCl3 MFC set to  0.000000
12/24/2010	11:28:59 AM	PHl3 MFC set to  0.000000
12/24/2010	11:28:59 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:28:59 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:28:59 AM	Tube furnace set to 0
12/24/2010	11:29:59 AM	H2 valve closed
12/24/2010	11:29:59 AM	BCl3 valve closed
12/24/2010	11:29:59 AM	PH3 valve closed
12/24/2010	11:29:59 AM	SiCl4 pre valve closed
12/24/2010	11:29:59 AM	SiCl4 post valve closed
12/24/2010	11:29:59 AM	Bubbler valve closed
12/24/2010	11:29:59 AM	Helium valve opened
12/24/2010	11:29:59 AM	Main Vac valve opened
12/24/2010	11:29:59 AM	Bypass valve opened
12/24/2010	11:29:59 AM	Helium MFC set to  100.000000
12/24/2010	11:29:59 AM	H2 MFC set to  0.000000
12/24/2010	11:29:59 AM	BCl3 MFC set to  0.000000
12/24/2010	11:29:59 AM	PHl3 MFC set to  0.000000
12/24/2010	11:29:59 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:29:59 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:29:59 AM	Tube furnace set to 0
12/24/2010	11:30:59 AM	Helium valve closed
12/24/2010	11:30:59 AM	H2 valve closed
12/24/2010	11:30:59 AM	BCl3 valve closed
12/24/2010	11:30:59 AM	PH3 valve closed
12/24/2010	11:30:59 AM	SiCl4 pre valve closed
12/24/2010	11:30:59 AM	SiCl4 post valve closed
12/24/2010	11:30:59 AM	Bubbler valve closed
12/24/2010	11:30:59 AM	Main Vac valve opened
12/24/2010	11:30:59 AM	Bypass valve opened
12/24/2010	11:30:59 AM	Helium MFC set to  0.000000
12/24/2010	11:30:59 AM	H2 MFC set to  0.000000
12/24/2010	11:30:59 AM	BCl3 MFC set to  0.000000
12/24/2010	11:30:59 AM	PHl3 MFC set to  0.000000
12/24/2010	11:30:59 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:30:59 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:30:59 AM	Tube furnace set to 0
12/24/2010	11:31:36 AM	Run aborted at 11:31 AM
12/24/2010	11:31:36 AM	Helium valve closed
12/24/2010	11:31:36 AM	H2 valve closed
12/24/2010	11:31:36 AM	BCl3 valve closed
12/24/2010	11:31:36 AM	PH3 valve closed
12/24/2010	11:31:36 AM	SiCl4 pre valve closed
12/24/2010	11:31:36 AM	SiCl4 post valve closed
12/24/2010	11:31:36 AM	Bypass valve closed
12/24/2010	11:31:36 AM	Main Vac valve closed
12/24/2010	11:31:36 AM	Bubbler valve closed
12/24/2010	11:31:36 AM	Helium MFC set to  0.000000
12/24/2010	11:31:36 AM	H2 MFC set to  0.000000
12/24/2010	11:31:36 AM	BCl3 MFC set to  0.000000
12/24/2010	11:31:36 AM	PHl3 MFC set to  0.000000
12/24/2010	11:31:36 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:31:36 AM	Tube furnace set to 0
12/24/2010	11:31:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/24/2010	11:31:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/24/2010	11:31:37 AM	Recipe started at 11:31 AM
12/24/2010	11:31:37 AM	Helium valve closed
12/24/2010	11:31:37 AM	H2 valve closed
12/24/2010	11:31:37 AM	BCl3 valve closed
12/24/2010	11:31:37 AM	PH3 valve closed
12/24/2010	11:31:37 AM	SiCl4 pre valve closed
12/24/2010	11:31:37 AM	SiCl4 post valve closed
12/24/2010	11:31:37 AM	Main Vac valve closed
12/24/2010	11:31:37 AM	Bubbler valve closed
12/24/2010	11:31:37 AM	Bypass valve opened
12/24/2010	11:31:37 AM	Helium MFC set to  0.000000
12/24/2010	11:31:37 AM	H2 MFC set to  0.000000
12/24/2010	11:31:37 AM	BCl3 MFC set to  0.000000
12/24/2010	11:31:37 AM	PHl3 MFC set to  0.000000
12/24/2010	11:31:37 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:31:37 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:31:37 AM	Tube furnace set to 0
12/24/2010	11:31:38 AM	Helium valve closed
12/24/2010	11:31:38 AM	H2 valve closed
12/24/2010	11:31:38 AM	BCl3 valve closed
12/24/2010	11:31:38 AM	PH3 valve closed
12/24/2010	11:31:38 AM	SiCl4 pre valve closed
12/24/2010	11:31:38 AM	SiCl4 post valve closed
12/24/2010	11:31:38 AM	Bubbler valve closed
12/24/2010	11:31:38 AM	Main Vac valve opened
12/24/2010	11:31:38 AM	Bypass valve opened
12/24/2010	11:31:38 AM	Helium MFC set to  0.000000
12/24/2010	11:31:38 AM	H2 MFC set to  0.000000
12/24/2010	11:31:38 AM	BCl3 MFC set to  0.000000
12/24/2010	11:31:38 AM	PHl3 MFC set to  0.000000
12/24/2010	11:31:38 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:31:38 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:31:38 AM	Tube furnace set to 0
12/24/2010	11:31:38 AM	Run finished at 11:31 AM
12/24/2010	11:31:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/24/2010	11:31:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/24/2010	11:31:53 AM	Recipe started at 11:31 AM
12/24/2010	11:31:53 AM	Helium valve closed
12/24/2010	11:31:53 AM	H2 valve closed
12/24/2010	11:31:53 AM	BCl3 valve closed
12/24/2010	11:31:53 AM	PH3 valve closed
12/24/2010	11:31:53 AM	SiCl4 pre valve closed
12/24/2010	11:31:53 AM	SiCl4 post valve closed
12/24/2010	11:31:53 AM	Main Vac valve closed
12/24/2010	11:31:53 AM	Bubbler valve closed
12/24/2010	11:31:53 AM	Bypass valve opened
12/24/2010	11:31:53 AM	Helium MFC set to  0.000000
12/24/2010	11:31:53 AM	H2 MFC set to  0.000000
12/24/2010	11:31:53 AM	BCl3 MFC set to  0.000000
12/24/2010	11:31:53 AM	PHl3 MFC set to  0.000000
12/24/2010	11:31:53 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:31:53 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:31:53 AM	Tube furnace set to 0
12/24/2010	11:31:53 AM	Helium valve closed
12/24/2010	11:31:53 AM	H2 valve closed
12/24/2010	11:31:53 AM	BCl3 valve closed
12/24/2010	11:31:53 AM	PH3 valve closed
12/24/2010	11:31:53 AM	SiCl4 pre valve closed
12/24/2010	11:31:53 AM	SiCl4 post valve closed
12/24/2010	11:31:53 AM	Bubbler valve closed
12/24/2010	11:31:53 AM	Main Vac valve opened
12/24/2010	11:31:53 AM	Bypass valve opened
12/24/2010	11:31:53 AM	Helium MFC set to  0.000000
12/24/2010	11:31:53 AM	H2 MFC set to  0.000000
12/24/2010	11:31:53 AM	BCl3 MFC set to  0.000000
12/24/2010	11:31:53 AM	PHl3 MFC set to  0.000000
12/24/2010	11:31:53 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:31:53 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:31:53 AM	Tube furnace set to 0
12/24/2010	11:32:53 AM	H2 valve closed
12/24/2010	11:32:53 AM	BCl3 valve closed
12/24/2010	11:32:53 AM	PH3 valve closed
12/24/2010	11:32:53 AM	SiCl4 pre valve closed
12/24/2010	11:32:53 AM	SiCl4 post valve closed
12/24/2010	11:32:53 AM	Bubbler valve closed
12/24/2010	11:32:53 AM	Helium valve opened
12/24/2010	11:32:53 AM	Main Vac valve opened
12/24/2010	11:32:53 AM	Bypass valve opened
12/24/2010	11:32:53 AM	Helium MFC set to  100.000000
12/24/2010	11:32:53 AM	H2 MFC set to  0.000000
12/24/2010	11:32:53 AM	BCl3 MFC set to  0.000000
12/24/2010	11:32:53 AM	PHl3 MFC set to  0.000000
12/24/2010	11:32:53 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:32:53 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:32:54 AM	Tube furnace set to 0
12/24/2010	11:33:54 AM	Helium valve closed
12/24/2010	11:33:54 AM	H2 valve closed
12/24/2010	11:33:54 AM	BCl3 valve closed
12/24/2010	11:33:54 AM	PH3 valve closed
12/24/2010	11:33:54 AM	SiCl4 pre valve closed
12/24/2010	11:33:54 AM	SiCl4 post valve closed
12/24/2010	11:33:54 AM	Bubbler valve closed
12/24/2010	11:33:54 AM	Main Vac valve opened
12/24/2010	11:33:54 AM	Bypass valve opened
12/24/2010	11:33:54 AM	Helium MFC set to  0.000000
12/24/2010	11:33:54 AM	H2 MFC set to  0.000000
12/24/2010	11:33:54 AM	BCl3 MFC set to  0.000000
12/24/2010	11:33:54 AM	PHl3 MFC set to  0.000000
12/24/2010	11:33:54 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:33:54 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:33:54 AM	Tube furnace set to 0
12/24/2010	11:34:54 AM	H2 valve closed
12/24/2010	11:34:54 AM	BCl3 valve closed
12/24/2010	11:34:54 AM	PH3 valve closed
12/24/2010	11:34:54 AM	SiCl4 pre valve closed
12/24/2010	11:34:54 AM	SiCl4 post valve closed
12/24/2010	11:34:54 AM	Bubbler valve closed
12/24/2010	11:34:54 AM	Helium valve opened
12/24/2010	11:34:54 AM	Main Vac valve opened
12/24/2010	11:34:54 AM	Bypass valve opened
12/24/2010	11:34:54 AM	Helium MFC set to  100.000000
12/24/2010	11:34:54 AM	H2 MFC set to  0.000000
12/24/2010	11:34:54 AM	BCl3 MFC set to  0.000000
12/24/2010	11:34:54 AM	PHl3 MFC set to  0.000000
12/24/2010	11:34:54 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:34:54 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:34:54 AM	Tube furnace set to 0
12/24/2010	11:35:54 AM	Helium valve closed
12/24/2010	11:35:54 AM	H2 valve closed
12/24/2010	11:35:54 AM	BCl3 valve closed
12/24/2010	11:35:54 AM	PH3 valve closed
12/24/2010	11:35:54 AM	SiCl4 pre valve closed
12/24/2010	11:35:54 AM	SiCl4 post valve closed
12/24/2010	11:35:54 AM	Bubbler valve closed
12/24/2010	11:35:54 AM	Main Vac valve opened
12/24/2010	11:35:54 AM	Bypass valve opened
12/24/2010	11:35:54 AM	Helium MFC set to  0.000000
12/24/2010	11:35:54 AM	H2 MFC set to  0.000000
12/24/2010	11:35:54 AM	BCl3 MFC set to  0.000000
12/24/2010	11:35:54 AM	PHl3 MFC set to  0.000000
12/24/2010	11:35:54 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:35:54 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:35:54 AM	Tube furnace set to 0
12/24/2010	11:36:54 AM	H2 valve closed
12/24/2010	11:36:54 AM	BCl3 valve closed
12/24/2010	11:36:54 AM	PH3 valve closed
12/24/2010	11:36:54 AM	SiCl4 pre valve closed
12/24/2010	11:36:54 AM	SiCl4 post valve closed
12/24/2010	11:36:54 AM	Bubbler valve closed
12/24/2010	11:36:54 AM	Helium valve opened
12/24/2010	11:36:54 AM	Main Vac valve opened
12/24/2010	11:36:54 AM	Bypass valve opened
12/24/2010	11:36:54 AM	Helium MFC set to  100.000000
12/24/2010	11:36:54 AM	H2 MFC set to  0.000000
12/24/2010	11:36:54 AM	BCl3 MFC set to  0.000000
12/24/2010	11:36:54 AM	PHl3 MFC set to  0.000000
12/24/2010	11:36:54 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:36:54 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:36:54 AM	Tube furnace set to 0
12/24/2010	11:37:54 AM	Helium valve closed
12/24/2010	11:37:54 AM	H2 valve closed
12/24/2010	11:37:54 AM	BCl3 valve closed
12/24/2010	11:37:54 AM	PH3 valve closed
12/24/2010	11:37:54 AM	SiCl4 pre valve closed
12/24/2010	11:37:54 AM	SiCl4 post valve closed
12/24/2010	11:37:54 AM	Bubbler valve closed
12/24/2010	11:37:54 AM	Main Vac valve opened
12/24/2010	11:37:54 AM	Bypass valve opened
12/24/2010	11:37:54 AM	Helium MFC set to  0.000000
12/24/2010	11:37:54 AM	H2 MFC set to  0.000000
12/24/2010	11:37:55 AM	BCl3 MFC set to  0.000000
12/24/2010	11:37:55 AM	PHl3 MFC set to  0.000000
12/24/2010	11:37:55 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:37:55 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:37:55 AM	Tube furnace set to 0
12/24/2010	11:38:55 AM	H2 valve closed
12/24/2010	11:38:55 AM	BCl3 valve closed
12/24/2010	11:38:55 AM	PH3 valve closed
12/24/2010	11:38:55 AM	SiCl4 pre valve closed
12/24/2010	11:38:55 AM	SiCl4 post valve closed
12/24/2010	11:38:55 AM	Bubbler valve closed
12/24/2010	11:38:55 AM	Helium valve opened
12/24/2010	11:38:55 AM	Main Vac valve opened
12/24/2010	11:38:55 AM	Bypass valve opened
12/24/2010	11:38:55 AM	Helium MFC set to  100.000000
12/24/2010	11:38:55 AM	H2 MFC set to  0.000000
12/24/2010	11:38:55 AM	BCl3 MFC set to  0.000000
12/24/2010	11:38:55 AM	PHl3 MFC set to  0.000000
12/24/2010	11:38:55 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:38:55 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:38:55 AM	Tube furnace set to 0
12/24/2010	11:39:55 AM	Helium valve closed
12/24/2010	11:39:55 AM	H2 valve closed
12/24/2010	11:39:55 AM	BCl3 valve closed
12/24/2010	11:39:55 AM	PH3 valve closed
12/24/2010	11:39:55 AM	SiCl4 pre valve closed
12/24/2010	11:39:55 AM	SiCl4 post valve closed
12/24/2010	11:39:55 AM	Bubbler valve closed
12/24/2010	11:39:55 AM	Main Vac valve opened
12/24/2010	11:39:55 AM	Bypass valve opened
12/24/2010	11:39:55 AM	Helium MFC set to  0.000000
12/24/2010	11:39:55 AM	H2 MFC set to  0.000000
12/24/2010	11:39:55 AM	BCl3 MFC set to  0.000000
12/24/2010	11:39:55 AM	PHl3 MFC set to  0.000000
12/24/2010	11:39:55 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:39:55 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:39:55 AM	Tube furnace set to 0
12/24/2010	11:40:55 AM	H2 valve closed
12/24/2010	11:40:55 AM	BCl3 valve closed
12/24/2010	11:40:55 AM	PH3 valve closed
12/24/2010	11:40:55 AM	SiCl4 pre valve closed
12/24/2010	11:40:55 AM	SiCl4 post valve closed
12/24/2010	11:40:55 AM	Bubbler valve closed
12/24/2010	11:40:55 AM	Helium valve opened
12/24/2010	11:40:55 AM	Main Vac valve opened
12/24/2010	11:40:55 AM	Bypass valve opened
12/24/2010	11:40:55 AM	Helium MFC set to  100.000000
12/24/2010	11:40:55 AM	H2 MFC set to  0.000000
12/24/2010	11:40:55 AM	BCl3 MFC set to  0.000000
12/24/2010	11:40:55 AM	PHl3 MFC set to  0.000000
12/24/2010	11:40:55 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:40:55 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:40:55 AM	Tube furnace set to 0
12/24/2010	11:41:55 AM	Helium valve closed
12/24/2010	11:41:55 AM	H2 valve closed
12/24/2010	11:41:55 AM	BCl3 valve closed
12/24/2010	11:41:55 AM	PH3 valve closed
12/24/2010	11:41:55 AM	SiCl4 pre valve closed
12/24/2010	11:41:55 AM	SiCl4 post valve closed
12/24/2010	11:41:55 AM	Bubbler valve closed
12/24/2010	11:41:55 AM	Main Vac valve opened
12/24/2010	11:41:55 AM	Bypass valve opened
12/24/2010	11:41:55 AM	Helium MFC set to  0.000000
12/24/2010	11:41:55 AM	H2 MFC set to  0.000000
12/24/2010	11:41:55 AM	BCl3 MFC set to  0.000000
12/24/2010	11:41:55 AM	PHl3 MFC set to  0.000000
12/24/2010	11:41:55 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:41:55 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:41:55 AM	Tube furnace set to 0
12/24/2010	11:42:56 AM	H2 valve closed
12/24/2010	11:42:56 AM	BCl3 valve closed
12/24/2010	11:42:56 AM	PH3 valve closed
12/24/2010	11:42:56 AM	SiCl4 pre valve closed
12/24/2010	11:42:56 AM	SiCl4 post valve closed
12/24/2010	11:42:56 AM	Bubbler valve closed
12/24/2010	11:42:56 AM	Helium valve opened
12/24/2010	11:42:56 AM	Main Vac valve opened
12/24/2010	11:42:56 AM	Bypass valve opened
12/24/2010	11:42:56 AM	Helium MFC set to  100.000000
12/24/2010	11:42:56 AM	H2 MFC set to  0.000000
12/24/2010	11:42:56 AM	BCl3 MFC set to  0.000000
12/24/2010	11:42:56 AM	PHl3 MFC set to  0.000000
12/24/2010	11:42:56 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:42:56 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:42:56 AM	Tube furnace set to 0
12/24/2010	11:43:56 AM	Helium valve closed
12/24/2010	11:43:56 AM	H2 valve closed
12/24/2010	11:43:56 AM	BCl3 valve closed
12/24/2010	11:43:56 AM	PH3 valve closed
12/24/2010	11:43:56 AM	SiCl4 pre valve closed
12/24/2010	11:43:56 AM	SiCl4 post valve closed
12/24/2010	11:43:56 AM	Bubbler valve closed
12/24/2010	11:43:56 AM	Main Vac valve opened
12/24/2010	11:43:56 AM	Bypass valve opened
12/24/2010	11:43:56 AM	Helium MFC set to  0.000000
12/24/2010	11:43:56 AM	H2 MFC set to  0.000000
12/24/2010	11:43:56 AM	BCl3 MFC set to  0.000000
12/24/2010	11:43:56 AM	PHl3 MFC set to  0.000000
12/24/2010	11:43:56 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:43:56 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:43:56 AM	Tube furnace set to 0
12/24/2010	11:44:56 AM	H2 valve closed
12/24/2010	11:44:56 AM	BCl3 valve closed
12/24/2010	11:44:56 AM	PH3 valve closed
12/24/2010	11:44:56 AM	SiCl4 pre valve closed
12/24/2010	11:44:56 AM	SiCl4 post valve closed
12/24/2010	11:44:56 AM	Bubbler valve closed
12/24/2010	11:44:56 AM	Helium valve opened
12/24/2010	11:44:56 AM	Main Vac valve opened
12/24/2010	11:44:56 AM	Bypass valve opened
12/24/2010	11:44:56 AM	Helium MFC set to  100.000000
12/24/2010	11:44:56 AM	H2 MFC set to  0.000000
12/24/2010	11:44:56 AM	BCl3 MFC set to  0.000000
12/24/2010	11:44:56 AM	PHl3 MFC set to  0.000000
12/24/2010	11:44:56 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:44:56 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:44:56 AM	Tube furnace set to 0
12/24/2010	11:45:56 AM	Helium valve closed
12/24/2010	11:45:56 AM	H2 valve closed
12/24/2010	11:45:56 AM	BCl3 valve closed
12/24/2010	11:45:56 AM	PH3 valve closed
12/24/2010	11:45:56 AM	SiCl4 pre valve closed
12/24/2010	11:45:56 AM	SiCl4 post valve closed
12/24/2010	11:45:56 AM	Bubbler valve closed
12/24/2010	11:45:56 AM	Main Vac valve opened
12/24/2010	11:45:56 AM	Bypass valve opened
12/24/2010	11:45:56 AM	Helium MFC set to  0.000000
12/24/2010	11:45:56 AM	H2 MFC set to  0.000000
12/24/2010	11:45:56 AM	BCl3 MFC set to  0.000000
12/24/2010	11:45:56 AM	PHl3 MFC set to  0.000000
12/24/2010	11:45:56 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:45:56 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:45:56 AM	Tube furnace set to 0
12/24/2010	11:46:50 AM	Run aborted at 11:46 AM
12/24/2010	11:46:50 AM	Helium valve closed
12/24/2010	11:46:50 AM	H2 valve closed
12/24/2010	11:46:50 AM	BCl3 valve closed
12/24/2010	11:46:50 AM	PH3 valve closed
12/24/2010	11:46:50 AM	SiCl4 pre valve closed
12/24/2010	11:46:50 AM	SiCl4 post valve closed
12/24/2010	11:46:50 AM	Bypass valve closed
12/24/2010	11:46:50 AM	Main Vac valve closed
12/24/2010	11:46:50 AM	Bubbler valve closed
12/24/2010	11:46:50 AM	Helium MFC set to  0.000000
12/24/2010	11:46:50 AM	H2 MFC set to  0.000000
12/24/2010	11:46:50 AM	BCl3 MFC set to  0.000000
12/24/2010	11:46:50 AM	PHl3 MFC set to  0.000000
12/24/2010	11:46:50 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:46:50 AM	Tube furnace set to 0
12/24/2010	11:46:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/24/2010	11:46:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/24/2010	11:46:52 AM	Recipe started at 11:46 AM
12/24/2010	11:46:52 AM	Helium valve closed
12/24/2010	11:46:52 AM	H2 valve closed
12/24/2010	11:46:52 AM	BCl3 valve closed
12/24/2010	11:46:52 AM	PH3 valve closed
12/24/2010	11:46:52 AM	SiCl4 pre valve closed
12/24/2010	11:46:52 AM	SiCl4 post valve closed
12/24/2010	11:46:52 AM	Main Vac valve closed
12/24/2010	11:46:52 AM	Bubbler valve closed
12/24/2010	11:46:52 AM	Bypass valve opened
12/24/2010	11:46:52 AM	Helium MFC set to  0.000000
12/24/2010	11:46:52 AM	H2 MFC set to  0.000000
12/24/2010	11:46:52 AM	BCl3 MFC set to  0.000000
12/24/2010	11:46:52 AM	PHl3 MFC set to  0.000000
12/24/2010	11:46:52 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:46:52 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:46:52 AM	Tube furnace set to 0
12/24/2010	11:46:52 AM	Helium valve closed
12/24/2010	11:46:52 AM	H2 valve closed
12/24/2010	11:46:52 AM	BCl3 valve closed
12/24/2010	11:46:52 AM	PH3 valve closed
12/24/2010	11:46:52 AM	SiCl4 pre valve closed
12/24/2010	11:46:52 AM	SiCl4 post valve closed
12/24/2010	11:46:52 AM	Bubbler valve closed
12/24/2010	11:46:52 AM	Main Vac valve opened
12/24/2010	11:46:52 AM	Bypass valve opened
12/24/2010	11:46:52 AM	Helium MFC set to  0.000000
12/24/2010	11:46:52 AM	H2 MFC set to  0.000000
12/24/2010	11:46:52 AM	BCl3 MFC set to  0.000000
12/24/2010	11:46:52 AM	PHl3 MFC set to  0.000000
12/24/2010	11:46:52 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:46:52 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:46:52 AM	Tube furnace set to 0
12/24/2010	11:46:52 AM	Run finished at 11:46 AM
12/24/2010	11:46:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/24/2010	11:47:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/24/2010	11:47:46 AM	Recipe started at 11:47 AM
12/24/2010	11:47:46 AM	Helium valve closed
12/24/2010	11:47:46 AM	H2 valve closed
12/24/2010	11:47:46 AM	BCl3 valve closed
12/24/2010	11:47:46 AM	PH3 valve closed
12/24/2010	11:47:46 AM	SiCl4 pre valve closed
12/24/2010	11:47:46 AM	SiCl4 post valve closed
12/24/2010	11:47:46 AM	Main Vac valve closed
12/24/2010	11:47:46 AM	Bubbler valve closed
12/24/2010	11:47:46 AM	Bypass valve opened
12/24/2010	11:47:46 AM	Helium MFC set to  0.000000
12/24/2010	11:47:46 AM	H2 MFC set to  0.000000
12/24/2010	11:47:46 AM	BCl3 MFC set to  0.000000
12/24/2010	11:47:46 AM	PHl3 MFC set to  0.000000
12/24/2010	11:47:46 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:47:46 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:47:46 AM	Tube furnace set to 0
12/24/2010	11:47:46 AM	Helium valve closed
12/24/2010	11:47:46 AM	H2 valve closed
12/24/2010	11:47:46 AM	BCl3 valve closed
12/24/2010	11:47:46 AM	PH3 valve closed
12/24/2010	11:47:46 AM	SiCl4 pre valve closed
12/24/2010	11:47:47 AM	SiCl4 post valve closed
12/24/2010	11:47:47 AM	Bubbler valve closed
12/24/2010	11:47:47 AM	Main Vac valve opened
12/24/2010	11:47:47 AM	Bypass valve opened
12/24/2010	11:47:47 AM	Helium MFC set to  0.000000
12/24/2010	11:47:47 AM	H2 MFC set to  0.000000
12/24/2010	11:47:47 AM	BCl3 MFC set to  0.000000
12/24/2010	11:47:47 AM	PHl3 MFC set to  0.000000
12/24/2010	11:47:47 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:47:47 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:47:47 AM	Tube furnace set to 0
12/24/2010	11:48:47 AM	H2 valve closed
12/24/2010	11:48:47 AM	BCl3 valve closed
12/24/2010	11:48:47 AM	PH3 valve closed
12/24/2010	11:48:47 AM	SiCl4 pre valve closed
12/24/2010	11:48:47 AM	SiCl4 post valve closed
12/24/2010	11:48:47 AM	Bubbler valve closed
12/24/2010	11:48:47 AM	Helium valve opened
12/24/2010	11:48:47 AM	Main Vac valve opened
12/24/2010	11:48:47 AM	Bypass valve opened
12/24/2010	11:48:47 AM	Helium MFC set to  100.000000
12/24/2010	11:48:47 AM	H2 MFC set to  0.000000
12/24/2010	11:48:47 AM	BCl3 MFC set to  0.000000
12/24/2010	11:48:47 AM	PHl3 MFC set to  0.000000
12/24/2010	11:48:47 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:48:47 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:48:47 AM	Tube furnace set to 0
12/24/2010	11:49:47 AM	Helium valve closed
12/24/2010	11:49:47 AM	H2 valve closed
12/24/2010	11:49:47 AM	BCl3 valve closed
12/24/2010	11:49:47 AM	PH3 valve closed
12/24/2010	11:49:47 AM	SiCl4 pre valve closed
12/24/2010	11:49:47 AM	SiCl4 post valve closed
12/24/2010	11:49:47 AM	Bubbler valve closed
12/24/2010	11:49:47 AM	Main Vac valve opened
12/24/2010	11:49:47 AM	Bypass valve opened
12/24/2010	11:49:47 AM	Helium MFC set to  0.000000
12/24/2010	11:49:47 AM	H2 MFC set to  0.000000
12/24/2010	11:49:47 AM	BCl3 MFC set to  0.000000
12/24/2010	11:49:47 AM	PHl3 MFC set to  0.000000
12/24/2010	11:49:47 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:49:47 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:49:47 AM	Tube furnace set to 0
12/24/2010	11:50:47 AM	H2 valve closed
12/24/2010	11:50:47 AM	BCl3 valve closed
12/24/2010	11:50:47 AM	PH3 valve closed
12/24/2010	11:50:47 AM	SiCl4 pre valve closed
12/24/2010	11:50:47 AM	SiCl4 post valve closed
12/24/2010	11:50:47 AM	Bubbler valve closed
12/24/2010	11:50:47 AM	Helium valve opened
12/24/2010	11:50:47 AM	Main Vac valve opened
12/24/2010	11:50:47 AM	Bypass valve opened
12/24/2010	11:50:47 AM	Helium MFC set to  100.000000
12/24/2010	11:50:47 AM	H2 MFC set to  0.000000
12/24/2010	11:50:47 AM	BCl3 MFC set to  0.000000
12/24/2010	11:50:47 AM	PHl3 MFC set to  0.000000
12/24/2010	11:50:47 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:50:47 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:50:47 AM	Tube furnace set to 0
12/24/2010	11:51:47 AM	Helium valve closed
12/24/2010	11:51:47 AM	H2 valve closed
12/24/2010	11:51:47 AM	BCl3 valve closed
12/24/2010	11:51:47 AM	PH3 valve closed
12/24/2010	11:51:47 AM	SiCl4 pre valve closed
12/24/2010	11:51:47 AM	SiCl4 post valve closed
12/24/2010	11:51:47 AM	Bubbler valve closed
12/24/2010	11:51:47 AM	Main Vac valve opened
12/24/2010	11:51:47 AM	Bypass valve opened
12/24/2010	11:51:47 AM	Helium MFC set to  0.000000
12/24/2010	11:51:47 AM	H2 MFC set to  0.000000
12/24/2010	11:51:47 AM	BCl3 MFC set to  0.000000
12/24/2010	11:51:47 AM	PHl3 MFC set to  0.000000
12/24/2010	11:51:47 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:51:47 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:51:48 AM	Tube furnace set to 0
12/24/2010	11:52:48 AM	H2 valve closed
12/24/2010	11:52:48 AM	BCl3 valve closed
12/24/2010	11:52:48 AM	PH3 valve closed
12/24/2010	11:52:48 AM	SiCl4 pre valve closed
12/24/2010	11:52:48 AM	SiCl4 post valve closed
12/24/2010	11:52:48 AM	Bubbler valve closed
12/24/2010	11:52:48 AM	Helium valve opened
12/24/2010	11:52:48 AM	Main Vac valve opened
12/24/2010	11:52:48 AM	Bypass valve opened
12/24/2010	11:52:48 AM	Helium MFC set to  100.000000
12/24/2010	11:52:48 AM	H2 MFC set to  0.000000
12/24/2010	11:52:48 AM	BCl3 MFC set to  0.000000
12/24/2010	11:52:48 AM	PHl3 MFC set to  0.000000
12/24/2010	11:52:48 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:52:48 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:52:48 AM	Tube furnace set to 0
12/24/2010	11:53:48 AM	Helium valve closed
12/24/2010	11:53:48 AM	H2 valve closed
12/24/2010	11:53:48 AM	BCl3 valve closed
12/24/2010	11:53:48 AM	PH3 valve closed
12/24/2010	11:53:48 AM	SiCl4 pre valve closed
12/24/2010	11:53:48 AM	SiCl4 post valve closed
12/24/2010	11:53:48 AM	Bubbler valve closed
12/24/2010	11:53:48 AM	Main Vac valve opened
12/24/2010	11:53:48 AM	Bypass valve opened
12/24/2010	11:53:48 AM	Helium MFC set to  0.000000
12/24/2010	11:53:48 AM	H2 MFC set to  0.000000
12/24/2010	11:53:48 AM	BCl3 MFC set to  0.000000
12/24/2010	11:53:48 AM	PHl3 MFC set to  0.000000
12/24/2010	11:53:48 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:53:48 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:53:48 AM	Tube furnace set to 0
12/24/2010	11:54:48 AM	H2 valve closed
12/24/2010	11:54:48 AM	BCl3 valve closed
12/24/2010	11:54:48 AM	PH3 valve closed
12/24/2010	11:54:48 AM	SiCl4 pre valve closed
12/24/2010	11:54:48 AM	SiCl4 post valve closed
12/24/2010	11:54:48 AM	Bubbler valve closed
12/24/2010	11:54:48 AM	Helium valve opened
12/24/2010	11:54:48 AM	Main Vac valve opened
12/24/2010	11:54:48 AM	Bypass valve opened
12/24/2010	11:54:48 AM	Helium MFC set to  100.000000
12/24/2010	11:54:48 AM	H2 MFC set to  0.000000
12/24/2010	11:54:48 AM	BCl3 MFC set to  0.000000
12/24/2010	11:54:48 AM	PHl3 MFC set to  0.000000
12/24/2010	11:54:48 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:54:48 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:54:48 AM	Tube furnace set to 0
12/24/2010	11:55:48 AM	Helium valve closed
12/24/2010	11:55:48 AM	H2 valve closed
12/24/2010	11:55:48 AM	BCl3 valve closed
12/24/2010	11:55:48 AM	PH3 valve closed
12/24/2010	11:55:48 AM	SiCl4 pre valve closed
12/24/2010	11:55:48 AM	SiCl4 post valve closed
12/24/2010	11:55:48 AM	Bubbler valve closed
12/24/2010	11:55:48 AM	Main Vac valve opened
12/24/2010	11:55:48 AM	Bypass valve opened
12/24/2010	11:55:48 AM	Helium MFC set to  0.000000
12/24/2010	11:55:48 AM	H2 MFC set to  0.000000
12/24/2010	11:55:48 AM	BCl3 MFC set to  0.000000
12/24/2010	11:55:48 AM	PHl3 MFC set to  0.000000
12/24/2010	11:55:48 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:55:48 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:55:48 AM	Tube furnace set to 0
12/24/2010	11:56:48 AM	H2 valve closed
12/24/2010	11:56:48 AM	BCl3 valve closed
12/24/2010	11:56:48 AM	PH3 valve closed
12/24/2010	11:56:48 AM	SiCl4 pre valve closed
12/24/2010	11:56:48 AM	SiCl4 post valve closed
12/24/2010	11:56:48 AM	Bubbler valve closed
12/24/2010	11:56:48 AM	Helium valve opened
12/24/2010	11:56:48 AM	Main Vac valve opened
12/24/2010	11:56:48 AM	Bypass valve opened
12/24/2010	11:56:48 AM	Helium MFC set to  100.000000
12/24/2010	11:56:48 AM	H2 MFC set to  0.000000
12/24/2010	11:56:48 AM	BCl3 MFC set to  0.000000
12/24/2010	11:56:48 AM	PHl3 MFC set to  0.000000
12/24/2010	11:56:48 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:56:48 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:56:49 AM	Tube furnace set to 0
12/24/2010	11:57:49 AM	Helium valve closed
12/24/2010	11:57:49 AM	H2 valve closed
12/24/2010	11:57:49 AM	BCl3 valve closed
12/24/2010	11:57:49 AM	PH3 valve closed
12/24/2010	11:57:49 AM	SiCl4 pre valve closed
12/24/2010	11:57:49 AM	SiCl4 post valve closed
12/24/2010	11:57:49 AM	Bubbler valve closed
12/24/2010	11:57:49 AM	Main Vac valve opened
12/24/2010	11:57:49 AM	Bypass valve opened
12/24/2010	11:57:49 AM	Helium MFC set to  0.000000
12/24/2010	11:57:49 AM	H2 MFC set to  0.000000
12/24/2010	11:57:49 AM	BCl3 MFC set to  0.000000
12/24/2010	11:57:49 AM	PHl3 MFC set to  0.000000
12/24/2010	11:57:49 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:57:49 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:57:49 AM	Tube furnace set to 0
12/24/2010	11:58:49 AM	H2 valve closed
12/24/2010	11:58:49 AM	BCl3 valve closed
12/24/2010	11:58:49 AM	PH3 valve closed
12/24/2010	11:58:49 AM	SiCl4 pre valve closed
12/24/2010	11:58:49 AM	SiCl4 post valve closed
12/24/2010	11:58:49 AM	Bubbler valve closed
12/24/2010	11:58:49 AM	Helium valve opened
12/24/2010	11:58:49 AM	Main Vac valve opened
12/24/2010	11:58:49 AM	Bypass valve opened
12/24/2010	11:58:49 AM	Helium MFC set to  100.000000
12/24/2010	11:58:49 AM	H2 MFC set to  0.000000
12/24/2010	11:58:49 AM	BCl3 MFC set to  0.000000
12/24/2010	11:58:49 AM	PHl3 MFC set to  0.000000
12/24/2010	11:58:49 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:58:49 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:58:49 AM	Tube furnace set to 0
12/24/2010	11:59:49 AM	Helium valve closed
12/24/2010	11:59:49 AM	H2 valve closed
12/24/2010	11:59:49 AM	BCl3 valve closed
12/24/2010	11:59:49 AM	PH3 valve closed
12/24/2010	11:59:49 AM	SiCl4 pre valve closed
12/24/2010	11:59:49 AM	SiCl4 post valve closed
12/24/2010	11:59:49 AM	Bubbler valve closed
12/24/2010	11:59:49 AM	Main Vac valve opened
12/24/2010	11:59:49 AM	Bypass valve opened
12/24/2010	11:59:49 AM	Helium MFC set to  0.000000
12/24/2010	11:59:49 AM	H2 MFC set to  0.000000
12/24/2010	11:59:49 AM	BCl3 MFC set to  0.000000
12/24/2010	11:59:49 AM	PHl3 MFC set to  0.000000
12/24/2010	11:59:49 AM	SiCl4 MFC set to  0.000000
12/24/2010	11:59:49 AM	Bypass solenoid MFC set to  0.000000
12/24/2010	11:59:49 AM	Tube furnace set to 0
12/24/2010	12:00:49 PM	H2 valve closed
12/24/2010	12:00:49 PM	BCl3 valve closed
12/24/2010	12:00:49 PM	PH3 valve closed
12/24/2010	12:00:49 PM	SiCl4 pre valve closed
12/24/2010	12:00:49 PM	SiCl4 post valve closed
12/24/2010	12:00:49 PM	Bubbler valve closed
12/24/2010	12:00:49 PM	Helium valve opened
12/24/2010	12:00:49 PM	Main Vac valve opened
12/24/2010	12:00:49 PM	Bypass valve opened
12/24/2010	12:00:49 PM	Helium MFC set to  100.000000
12/24/2010	12:00:49 PM	H2 MFC set to  0.000000
12/24/2010	12:00:49 PM	BCl3 MFC set to  0.000000
12/24/2010	12:00:49 PM	PHl3 MFC set to  0.000000
12/24/2010	12:00:49 PM	SiCl4 MFC set to  0.000000
12/24/2010	12:00:49 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	12:00:49 PM	Tube furnace set to 0
12/24/2010	12:01:49 PM	Helium valve closed
12/24/2010	12:01:49 PM	H2 valve closed
12/24/2010	12:01:49 PM	BCl3 valve closed
12/24/2010	12:01:49 PM	PH3 valve closed
12/24/2010	12:01:49 PM	SiCl4 pre valve closed
12/24/2010	12:01:49 PM	SiCl4 post valve closed
12/24/2010	12:01:49 PM	Bubbler valve closed
12/24/2010	12:01:49 PM	Main Vac valve opened
12/24/2010	12:01:49 PM	Bypass valve opened
12/24/2010	12:01:49 PM	Helium MFC set to  0.000000
12/24/2010	12:01:49 PM	H2 MFC set to  0.000000
12/24/2010	12:01:49 PM	BCl3 MFC set to  0.000000
12/24/2010	12:01:49 PM	PHl3 MFC set to  0.000000
12/24/2010	12:01:49 PM	SiCl4 MFC set to  0.000000
12/24/2010	12:01:49 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	12:01:50 PM	Tube furnace set to 0
12/24/2010	12:02:50 PM	H2 valve closed
12/24/2010	12:02:50 PM	BCl3 valve closed
12/24/2010	12:02:50 PM	PH3 valve closed
12/24/2010	12:02:50 PM	SiCl4 pre valve closed
12/24/2010	12:02:50 PM	SiCl4 post valve closed
12/24/2010	12:02:50 PM	Bubbler valve closed
12/24/2010	12:02:50 PM	Helium valve opened
12/24/2010	12:02:50 PM	Main Vac valve opened
12/24/2010	12:02:50 PM	Bypass valve opened
12/24/2010	12:02:50 PM	Helium MFC set to  100.000000
12/24/2010	12:02:50 PM	H2 MFC set to  0.000000
12/24/2010	12:02:50 PM	BCl3 MFC set to  0.000000
12/24/2010	12:02:50 PM	PHl3 MFC set to  0.000000
12/24/2010	12:02:50 PM	SiCl4 MFC set to  0.000000
12/24/2010	12:02:50 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	12:02:50 PM	Tube furnace set to 0
12/24/2010	12:03:50 PM	Helium valve closed
12/24/2010	12:03:50 PM	H2 valve closed
12/24/2010	12:03:50 PM	BCl3 valve closed
12/24/2010	12:03:50 PM	PH3 valve closed
12/24/2010	12:03:50 PM	SiCl4 pre valve closed
12/24/2010	12:03:50 PM	SiCl4 post valve closed
12/24/2010	12:03:50 PM	Bubbler valve closed
12/24/2010	12:03:50 PM	Main Vac valve opened
12/24/2010	12:03:50 PM	Bypass valve opened
12/24/2010	12:03:50 PM	Helium MFC set to  0.000000
12/24/2010	12:03:50 PM	H2 MFC set to  0.000000
12/24/2010	12:03:50 PM	BCl3 MFC set to  0.000000
12/24/2010	12:03:50 PM	PHl3 MFC set to  0.000000
12/24/2010	12:03:50 PM	SiCl4 MFC set to  0.000000
12/24/2010	12:03:50 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	12:03:50 PM	Tube furnace set to 0
12/24/2010	12:04:50 PM	H2 valve closed
12/24/2010	12:04:50 PM	BCl3 valve closed
12/24/2010	12:04:50 PM	PH3 valve closed
12/24/2010	12:04:50 PM	SiCl4 pre valve closed
12/24/2010	12:04:50 PM	SiCl4 post valve closed
12/24/2010	12:04:50 PM	Bubbler valve closed
12/24/2010	12:04:50 PM	Helium valve opened
12/24/2010	12:04:50 PM	Main Vac valve opened
12/24/2010	12:04:50 PM	Bypass valve opened
12/24/2010	12:04:50 PM	Helium MFC set to  100.000000
12/24/2010	12:04:50 PM	H2 MFC set to  0.000000
12/24/2010	12:04:50 PM	BCl3 MFC set to  0.000000
12/24/2010	12:04:50 PM	PHl3 MFC set to  0.000000
12/24/2010	12:04:50 PM	SiCl4 MFC set to  0.000000
12/24/2010	12:04:50 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	12:04:50 PM	Tube furnace set to 0
12/24/2010	12:05:50 PM	Helium valve closed
12/24/2010	12:05:50 PM	H2 valve closed
12/24/2010	12:05:50 PM	BCl3 valve closed
12/24/2010	12:05:50 PM	PH3 valve closed
12/24/2010	12:05:50 PM	SiCl4 pre valve closed
12/24/2010	12:05:50 PM	SiCl4 post valve closed
12/24/2010	12:05:50 PM	Bubbler valve closed
12/24/2010	12:05:50 PM	Main Vac valve opened
12/24/2010	12:05:50 PM	Bypass valve opened
12/24/2010	12:05:50 PM	Helium MFC set to  0.000000
12/24/2010	12:05:50 PM	H2 MFC set to  0.000000
12/24/2010	12:05:50 PM	BCl3 MFC set to  0.000000
12/24/2010	12:05:50 PM	PHl3 MFC set to  0.000000
12/24/2010	12:05:50 PM	SiCl4 MFC set to  0.000000
12/24/2010	12:05:50 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	12:05:50 PM	Tube furnace set to 0
12/24/2010	12:06:46 PM	Run aborted at 12:06 PM
12/24/2010	12:06:46 PM	Helium valve closed
12/24/2010	12:06:46 PM	H2 valve closed
12/24/2010	12:06:46 PM	BCl3 valve closed
12/24/2010	12:06:46 PM	PH3 valve closed
12/24/2010	12:06:46 PM	SiCl4 pre valve closed
12/24/2010	12:06:46 PM	SiCl4 post valve closed
12/24/2010	12:06:46 PM	Bypass valve closed
12/24/2010	12:06:46 PM	Main Vac valve closed
12/24/2010	12:06:46 PM	Bubbler valve closed
12/24/2010	12:06:46 PM	Helium MFC set to  0.000000
12/24/2010	12:06:46 PM	H2 MFC set to  0.000000
12/24/2010	12:06:46 PM	BCl3 MFC set to  0.000000
12/24/2010	12:06:46 PM	PHl3 MFC set to  0.000000
12/24/2010	12:06:46 PM	SiCl4 MFC set to  0.000000
12/24/2010	12:06:46 PM	Tube furnace set to 0
12/24/2010	12:06:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/24/2010	12:06:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/24/2010	12:06:47 PM	Recipe started at 12:06 PM
12/24/2010	12:06:47 PM	Helium valve closed
12/24/2010	12:06:47 PM	H2 valve closed
12/24/2010	12:06:47 PM	BCl3 valve closed
12/24/2010	12:06:47 PM	PH3 valve closed
12/24/2010	12:06:47 PM	SiCl4 pre valve closed
12/24/2010	12:06:47 PM	SiCl4 post valve closed
12/24/2010	12:06:47 PM	Main Vac valve closed
12/24/2010	12:06:47 PM	Bubbler valve closed
12/24/2010	12:06:47 PM	Bypass valve opened
12/24/2010	12:06:47 PM	Helium MFC set to  0.000000
12/24/2010	12:06:47 PM	H2 MFC set to  0.000000
12/24/2010	12:06:47 PM	BCl3 MFC set to  0.000000
12/24/2010	12:06:47 PM	PHl3 MFC set to  0.000000
12/24/2010	12:06:47 PM	SiCl4 MFC set to  0.000000
12/24/2010	12:06:47 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	12:06:47 PM	Tube furnace set to 0
12/24/2010	12:06:48 PM	Helium valve closed
12/24/2010	12:06:48 PM	H2 valve closed
12/24/2010	12:06:48 PM	BCl3 valve closed
12/24/2010	12:06:48 PM	PH3 valve closed
12/24/2010	12:06:48 PM	SiCl4 pre valve closed
12/24/2010	12:06:48 PM	SiCl4 post valve closed
12/24/2010	12:06:48 PM	Bubbler valve closed
12/24/2010	12:06:48 PM	Main Vac valve opened
12/24/2010	12:06:48 PM	Bypass valve opened
12/24/2010	12:06:48 PM	Helium MFC set to  0.000000
12/24/2010	12:06:48 PM	H2 MFC set to  0.000000
12/24/2010	12:06:48 PM	BCl3 MFC set to  0.000000
12/24/2010	12:06:48 PM	PHl3 MFC set to  0.000000
12/24/2010	12:06:48 PM	SiCl4 MFC set to  0.000000
12/24/2010	12:06:48 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	12:06:48 PM	Tube furnace set to 0
12/24/2010	12:06:48 PM	Run finished at 12:06 PM
12/24/2010	12:06:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/24/2010	12:07:09 PM	Recipe started at 12:07 PM
12/24/2010	12:07:09 PM	Helium valve closed
12/24/2010	12:07:09 PM	BCl3 valve closed
12/24/2010	12:07:09 PM	PH3 valve closed
12/24/2010	12:07:09 PM	SiCl4 pre valve closed
12/24/2010	12:07:09 PM	SiCl4 post valve closed
12/24/2010	12:07:09 PM	Main Vac valve closed
12/24/2010	12:07:09 PM	Bypass valve closed
12/24/2010	12:07:09 PM	Bubbler valve closed
12/24/2010	12:07:09 PM	H2 valve opened
12/24/2010	12:07:09 PM	Helium MFC set to  0.000000
12/24/2010	12:07:09 PM	H2 MFC set to  500.000000
12/24/2010	12:07:09 PM	BCl3 MFC set to  0.000000
12/24/2010	12:07:09 PM	PHl3 MFC set to  0.000000
12/24/2010	12:07:09 PM	SiCl4 MFC set to  0.000000
12/24/2010	12:07:09 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	12:07:09 PM	Tube furnace set to 0
12/24/2010	12:08:26 PM	Helium valve closed
12/24/2010	12:08:26 PM	BCl3 valve closed
12/24/2010	12:08:26 PM	PH3 valve closed
12/24/2010	12:08:26 PM	SiCl4 pre valve closed
12/24/2010	12:08:26 PM	SiCl4 post valve closed
12/24/2010	12:08:26 PM	Main Vac valve closed
12/24/2010	12:08:26 PM	Bypass valve closed
12/24/2010	12:08:26 PM	H2 valve opened
12/24/2010	12:08:26 PM	Bubbler valve opened
12/24/2010	12:08:26 PM	Helium MFC set to  0.000000
12/24/2010	12:08:26 PM	H2 MFC set to  500.000000
12/24/2010	12:08:26 PM	BCl3 MFC set to  0.000000
12/24/2010	12:08:26 PM	PHl3 MFC set to  0.000000
12/24/2010	12:08:26 PM	SiCl4 MFC set to  0.000000
12/24/2010	12:08:26 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	12:08:26 PM	Tube furnace set to 1000
12/24/2010	12:28:26 PM	Helium valve closed
12/24/2010	12:28:26 PM	PH3 valve closed
12/24/2010	12:28:26 PM	Main Vac valve closed
12/24/2010	12:28:26 PM	Bypass valve closed
12/24/2010	12:28:26 PM	H2 valve opened
12/24/2010	12:28:26 PM	BCl3 valve opened
12/24/2010	12:28:26 PM	SiCl4 pre valve opened
12/24/2010	12:28:26 PM	SiCl4 post valve opened
12/24/2010	12:28:26 PM	Bubbler valve opened
12/24/2010	12:28:26 PM	Helium MFC set to  0.000000
12/24/2010	12:28:26 PM	H2 MFC set to  500.000000
12/24/2010	12:28:26 PM	BCl3 MFC set to  12.000000
12/24/2010	12:28:26 PM	PHl3 MFC set to  0.000000
12/24/2010	12:28:26 PM	SiCl4 MFC set to  50.000000
12/24/2010	12:28:26 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	12:28:26 PM	Tube furnace set to 1000
12/24/2010	12:48:26 PM	H2 valve closed
12/24/2010	12:48:26 PM	BCl3 valve closed
12/24/2010	12:48:26 PM	PH3 valve closed
12/24/2010	12:48:26 PM	SiCl4 pre valve closed
12/24/2010	12:48:26 PM	SiCl4 post valve closed
12/24/2010	12:48:26 PM	Main Vac valve closed
12/24/2010	12:48:26 PM	Bypass valve closed
12/24/2010	12:48:26 PM	Helium valve opened
12/24/2010	12:48:26 PM	Bubbler valve opened
12/24/2010	12:48:26 PM	Helium MFC set to  500.000000
12/24/2010	12:48:26 PM	H2 MFC set to  0.000000
12/24/2010	12:48:26 PM	BCl3 MFC set to  0.000000
12/24/2010	12:48:26 PM	PHl3 MFC set to  0.000000
12/24/2010	12:48:26 PM	SiCl4 MFC set to  0.000000
12/24/2010	12:48:26 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	12:48:27 PM	Tube furnace set to 0
12/24/2010	1:08:27 PM	Helium valve closed
12/24/2010	1:08:27 PM	H2 valve closed
12/24/2010	1:08:27 PM	BCl3 valve closed
12/24/2010	1:08:27 PM	PH3 valve closed
12/24/2010	1:08:27 PM	SiCl4 pre valve closed
12/24/2010	1:08:27 PM	SiCl4 post valve closed
12/24/2010	1:08:27 PM	Main Vac valve closed
12/24/2010	1:08:27 PM	Bypass valve closed
12/24/2010	1:08:27 PM	Bubbler valve closed
12/24/2010	1:08:27 PM	Helium MFC set to  0.000000
12/24/2010	1:08:27 PM	H2 MFC set to  0.000000
12/24/2010	1:08:27 PM	BCl3 MFC set to  0.000000
12/24/2010	1:08:27 PM	PHl3 MFC set to  0.000000
12/24/2010	1:08:27 PM	SiCl4 MFC set to  0.000000
12/24/2010	1:08:27 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	1:08:27 PM	Tube furnace set to 0
12/24/2010	1:08:27 PM	Run finished at 1:08 PM
12/24/2010	1:19:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/24/2010	1:19:46 PM	Recipe started at 1:19 PM
12/24/2010	1:19:46 PM	Helium valve closed
12/24/2010	1:19:46 PM	H2 valve closed
12/24/2010	1:19:46 PM	BCl3 valve closed
12/24/2010	1:19:46 PM	PH3 valve closed
12/24/2010	1:19:46 PM	SiCl4 pre valve closed
12/24/2010	1:19:46 PM	SiCl4 post valve closed
12/24/2010	1:19:46 PM	Main Vac valve closed
12/24/2010	1:19:46 PM	Bubbler valve closed
12/24/2010	1:19:46 PM	Bypass valve opened
12/24/2010	1:19:46 PM	Helium MFC set to  0.000000
12/24/2010	1:19:46 PM	H2 MFC set to  0.000000
12/24/2010	1:19:46 PM	BCl3 MFC set to  0.000000
12/24/2010	1:19:46 PM	PHl3 MFC set to  0.000000
12/24/2010	1:19:46 PM	SiCl4 MFC set to  0.000000
12/24/2010	1:19:46 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	1:19:46 PM	Tube furnace set to 0
12/24/2010	1:20:43 PM	Helium valve closed
12/24/2010	1:20:43 PM	H2 valve closed
12/24/2010	1:20:43 PM	BCl3 valve closed
12/24/2010	1:20:43 PM	PH3 valve closed
12/24/2010	1:20:43 PM	SiCl4 pre valve closed
12/24/2010	1:20:43 PM	SiCl4 post valve closed
12/24/2010	1:20:43 PM	Bubbler valve closed
12/24/2010	1:20:43 PM	Main Vac valve opened
12/24/2010	1:20:43 PM	Bypass valve opened
12/24/2010	1:20:43 PM	Helium MFC set to  0.000000
12/24/2010	1:20:43 PM	H2 MFC set to  0.000000
12/24/2010	1:20:43 PM	BCl3 MFC set to  0.000000
12/24/2010	1:20:43 PM	PHl3 MFC set to  0.000000
12/24/2010	1:20:43 PM	SiCl4 MFC set to  0.000000
12/24/2010	1:20:43 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	1:20:43 PM	Tube furnace set to 0
12/24/2010	1:20:43 PM	Run finished at 1:20 PM
12/24/2010	1:20:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/24/2010	2:08:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/24/2010	2:09:08 PM	Recipe started at 2:09 PM
12/24/2010	2:09:08 PM	Helium valve closed
12/24/2010	2:09:08 PM	H2 valve closed
12/24/2010	2:09:08 PM	BCl3 valve closed
12/24/2010	2:09:08 PM	PH3 valve closed
12/24/2010	2:09:08 PM	SiCl4 pre valve closed
12/24/2010	2:09:08 PM	SiCl4 post valve closed
12/24/2010	2:09:08 PM	Main Vac valve closed
12/24/2010	2:09:08 PM	Bubbler valve closed
12/24/2010	2:09:08 PM	Bypass valve opened
12/24/2010	2:09:08 PM	Helium MFC set to  0.000000
12/24/2010	2:09:08 PM	H2 MFC set to  0.000000
12/24/2010	2:09:08 PM	BCl3 MFC set to  0.000000
12/24/2010	2:09:08 PM	PHl3 MFC set to  0.000000
12/24/2010	2:09:08 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:09:08 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:09:08 PM	Tube furnace set to 0
12/24/2010	2:09:09 PM	Helium valve closed
12/24/2010	2:09:09 PM	H2 valve closed
12/24/2010	2:09:09 PM	BCl3 valve closed
12/24/2010	2:09:09 PM	PH3 valve closed
12/24/2010	2:09:09 PM	SiCl4 pre valve closed
12/24/2010	2:09:09 PM	SiCl4 post valve closed
12/24/2010	2:09:09 PM	Bubbler valve closed
12/24/2010	2:09:09 PM	Main Vac valve opened
12/24/2010	2:09:09 PM	Bypass valve opened
12/24/2010	2:09:09 PM	Helium MFC set to  0.000000
12/24/2010	2:09:09 PM	H2 MFC set to  0.000000
12/24/2010	2:09:09 PM	BCl3 MFC set to  0.000000
12/24/2010	2:09:09 PM	PHl3 MFC set to  0.000000
12/24/2010	2:09:09 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:09:09 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:09:09 PM	Tube furnace set to 0
12/24/2010	2:10:09 PM	H2 valve closed
12/24/2010	2:10:09 PM	BCl3 valve closed
12/24/2010	2:10:09 PM	PH3 valve closed
12/24/2010	2:10:09 PM	SiCl4 pre valve closed
12/24/2010	2:10:09 PM	SiCl4 post valve closed
12/24/2010	2:10:09 PM	Bubbler valve closed
12/24/2010	2:10:09 PM	Helium valve opened
12/24/2010	2:10:09 PM	Main Vac valve opened
12/24/2010	2:10:09 PM	Bypass valve opened
12/24/2010	2:10:09 PM	Helium MFC set to  100.000000
12/24/2010	2:10:09 PM	H2 MFC set to  0.000000
12/24/2010	2:10:09 PM	BCl3 MFC set to  0.000000
12/24/2010	2:10:09 PM	PHl3 MFC set to  0.000000
12/24/2010	2:10:09 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:10:09 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:10:09 PM	Tube furnace set to 0
12/24/2010	2:11:09 PM	Helium valve closed
12/24/2010	2:11:09 PM	H2 valve closed
12/24/2010	2:11:09 PM	BCl3 valve closed
12/24/2010	2:11:09 PM	PH3 valve closed
12/24/2010	2:11:09 PM	SiCl4 pre valve closed
12/24/2010	2:11:09 PM	SiCl4 post valve closed
12/24/2010	2:11:09 PM	Bubbler valve closed
12/24/2010	2:11:09 PM	Main Vac valve opened
12/24/2010	2:11:09 PM	Bypass valve opened
12/24/2010	2:11:09 PM	Helium MFC set to  0.000000
12/24/2010	2:11:09 PM	H2 MFC set to  0.000000
12/24/2010	2:11:09 PM	BCl3 MFC set to  0.000000
12/24/2010	2:11:09 PM	PHl3 MFC set to  0.000000
12/24/2010	2:11:09 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:11:09 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:11:09 PM	Tube furnace set to 0
12/24/2010	2:12:09 PM	H2 valve closed
12/24/2010	2:12:09 PM	BCl3 valve closed
12/24/2010	2:12:09 PM	PH3 valve closed
12/24/2010	2:12:09 PM	SiCl4 pre valve closed
12/24/2010	2:12:09 PM	SiCl4 post valve closed
12/24/2010	2:12:09 PM	Bubbler valve closed
12/24/2010	2:12:09 PM	Helium valve opened
12/24/2010	2:12:09 PM	Main Vac valve opened
12/24/2010	2:12:09 PM	Bypass valve opened
12/24/2010	2:12:09 PM	Helium MFC set to  100.000000
12/24/2010	2:12:09 PM	H2 MFC set to  0.000000
12/24/2010	2:12:09 PM	BCl3 MFC set to  0.000000
12/24/2010	2:12:09 PM	PHl3 MFC set to  0.000000
12/24/2010	2:12:09 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:12:09 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:12:09 PM	Tube furnace set to 0
12/24/2010	2:13:09 PM	Helium valve closed
12/24/2010	2:13:09 PM	H2 valve closed
12/24/2010	2:13:09 PM	BCl3 valve closed
12/24/2010	2:13:09 PM	PH3 valve closed
12/24/2010	2:13:09 PM	SiCl4 pre valve closed
12/24/2010	2:13:09 PM	SiCl4 post valve closed
12/24/2010	2:13:09 PM	Bubbler valve closed
12/24/2010	2:13:09 PM	Main Vac valve opened
12/24/2010	2:13:09 PM	Bypass valve opened
12/24/2010	2:13:09 PM	Helium MFC set to  0.000000
12/24/2010	2:13:09 PM	H2 MFC set to  0.000000
12/24/2010	2:13:09 PM	BCl3 MFC set to  0.000000
12/24/2010	2:13:09 PM	PHl3 MFC set to  0.000000
12/24/2010	2:13:09 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:13:09 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:13:10 PM	Tube furnace set to 0
12/24/2010	2:14:10 PM	H2 valve closed
12/24/2010	2:14:10 PM	BCl3 valve closed
12/24/2010	2:14:10 PM	PH3 valve closed
12/24/2010	2:14:10 PM	SiCl4 pre valve closed
12/24/2010	2:14:10 PM	SiCl4 post valve closed
12/24/2010	2:14:10 PM	Bubbler valve closed
12/24/2010	2:14:10 PM	Helium valve opened
12/24/2010	2:14:10 PM	Main Vac valve opened
12/24/2010	2:14:10 PM	Bypass valve opened
12/24/2010	2:14:10 PM	Helium MFC set to  100.000000
12/24/2010	2:14:10 PM	H2 MFC set to  0.000000
12/24/2010	2:14:10 PM	BCl3 MFC set to  0.000000
12/24/2010	2:14:10 PM	PHl3 MFC set to  0.000000
12/24/2010	2:14:10 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:14:10 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:14:10 PM	Tube furnace set to 0
12/24/2010	2:15:10 PM	Helium valve closed
12/24/2010	2:15:10 PM	H2 valve closed
12/24/2010	2:15:10 PM	BCl3 valve closed
12/24/2010	2:15:10 PM	PH3 valve closed
12/24/2010	2:15:10 PM	SiCl4 pre valve closed
12/24/2010	2:15:10 PM	SiCl4 post valve closed
12/24/2010	2:15:10 PM	Bubbler valve closed
12/24/2010	2:15:10 PM	Main Vac valve opened
12/24/2010	2:15:10 PM	Bypass valve opened
12/24/2010	2:15:10 PM	Helium MFC set to  0.000000
12/24/2010	2:15:10 PM	H2 MFC set to  0.000000
12/24/2010	2:15:10 PM	BCl3 MFC set to  0.000000
12/24/2010	2:15:10 PM	PHl3 MFC set to  0.000000
12/24/2010	2:15:10 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:15:10 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:15:10 PM	Tube furnace set to 0
12/24/2010	2:16:10 PM	H2 valve closed
12/24/2010	2:16:10 PM	BCl3 valve closed
12/24/2010	2:16:10 PM	PH3 valve closed
12/24/2010	2:16:10 PM	SiCl4 pre valve closed
12/24/2010	2:16:10 PM	SiCl4 post valve closed
12/24/2010	2:16:10 PM	Bubbler valve closed
12/24/2010	2:16:10 PM	Helium valve opened
12/24/2010	2:16:10 PM	Main Vac valve opened
12/24/2010	2:16:10 PM	Bypass valve opened
12/24/2010	2:16:10 PM	Helium MFC set to  100.000000
12/24/2010	2:16:10 PM	H2 MFC set to  0.000000
12/24/2010	2:16:10 PM	BCl3 MFC set to  0.000000
12/24/2010	2:16:10 PM	PHl3 MFC set to  0.000000
12/24/2010	2:16:10 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:16:10 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:16:10 PM	Tube furnace set to 0
12/24/2010	2:17:10 PM	Helium valve closed
12/24/2010	2:17:10 PM	H2 valve closed
12/24/2010	2:17:10 PM	BCl3 valve closed
12/24/2010	2:17:10 PM	PH3 valve closed
12/24/2010	2:17:10 PM	SiCl4 pre valve closed
12/24/2010	2:17:10 PM	SiCl4 post valve closed
12/24/2010	2:17:10 PM	Bubbler valve closed
12/24/2010	2:17:10 PM	Main Vac valve opened
12/24/2010	2:17:10 PM	Bypass valve opened
12/24/2010	2:17:10 PM	Helium MFC set to  0.000000
12/24/2010	2:17:10 PM	H2 MFC set to  0.000000
12/24/2010	2:17:10 PM	BCl3 MFC set to  0.000000
12/24/2010	2:17:10 PM	PHl3 MFC set to  0.000000
12/24/2010	2:17:10 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:17:10 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:17:10 PM	Tube furnace set to 0
12/24/2010	2:18:10 PM	H2 valve closed
12/24/2010	2:18:10 PM	BCl3 valve closed
12/24/2010	2:18:10 PM	PH3 valve closed
12/24/2010	2:18:10 PM	SiCl4 pre valve closed
12/24/2010	2:18:10 PM	SiCl4 post valve closed
12/24/2010	2:18:10 PM	Bubbler valve closed
12/24/2010	2:18:10 PM	Helium valve opened
12/24/2010	2:18:10 PM	Main Vac valve opened
12/24/2010	2:18:10 PM	Bypass valve opened
12/24/2010	2:18:10 PM	Helium MFC set to  100.000000
12/24/2010	2:18:10 PM	H2 MFC set to  0.000000
12/24/2010	2:18:10 PM	BCl3 MFC set to  0.000000
12/24/2010	2:18:10 PM	PHl3 MFC set to  0.000000
12/24/2010	2:18:10 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:18:10 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:18:11 PM	Tube furnace set to 0
12/24/2010	2:19:11 PM	Helium valve closed
12/24/2010	2:19:11 PM	H2 valve closed
12/24/2010	2:19:11 PM	BCl3 valve closed
12/24/2010	2:19:11 PM	PH3 valve closed
12/24/2010	2:19:11 PM	SiCl4 pre valve closed
12/24/2010	2:19:11 PM	SiCl4 post valve closed
12/24/2010	2:19:11 PM	Bubbler valve closed
12/24/2010	2:19:11 PM	Main Vac valve opened
12/24/2010	2:19:11 PM	Bypass valve opened
12/24/2010	2:19:11 PM	Helium MFC set to  0.000000
12/24/2010	2:19:11 PM	H2 MFC set to  0.000000
12/24/2010	2:19:11 PM	BCl3 MFC set to  0.000000
12/24/2010	2:19:11 PM	PHl3 MFC set to  0.000000
12/24/2010	2:19:11 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:19:11 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:19:11 PM	Tube furnace set to 0
12/24/2010	2:20:11 PM	H2 valve closed
12/24/2010	2:20:11 PM	BCl3 valve closed
12/24/2010	2:20:11 PM	PH3 valve closed
12/24/2010	2:20:11 PM	SiCl4 pre valve closed
12/24/2010	2:20:11 PM	SiCl4 post valve closed
12/24/2010	2:20:11 PM	Bubbler valve closed
12/24/2010	2:20:11 PM	Helium valve opened
12/24/2010	2:20:11 PM	Main Vac valve opened
12/24/2010	2:20:11 PM	Bypass valve opened
12/24/2010	2:20:11 PM	Helium MFC set to  100.000000
12/24/2010	2:20:11 PM	H2 MFC set to  0.000000
12/24/2010	2:20:11 PM	BCl3 MFC set to  0.000000
12/24/2010	2:20:11 PM	PHl3 MFC set to  0.000000
12/24/2010	2:20:11 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:20:11 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:20:11 PM	Tube furnace set to 0
12/24/2010	2:21:11 PM	Helium valve closed
12/24/2010	2:21:11 PM	H2 valve closed
12/24/2010	2:21:11 PM	BCl3 valve closed
12/24/2010	2:21:11 PM	PH3 valve closed
12/24/2010	2:21:11 PM	SiCl4 pre valve closed
12/24/2010	2:21:11 PM	SiCl4 post valve closed
12/24/2010	2:21:11 PM	Bubbler valve closed
12/24/2010	2:21:11 PM	Main Vac valve opened
12/24/2010	2:21:11 PM	Bypass valve opened
12/24/2010	2:21:11 PM	Helium MFC set to  0.000000
12/24/2010	2:21:11 PM	H2 MFC set to  0.000000
12/24/2010	2:21:11 PM	BCl3 MFC set to  0.000000
12/24/2010	2:21:11 PM	PHl3 MFC set to  0.000000
12/24/2010	2:21:11 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:21:11 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:21:11 PM	Tube furnace set to 0
12/24/2010	2:22:11 PM	H2 valve closed
12/24/2010	2:22:11 PM	BCl3 valve closed
12/24/2010	2:22:11 PM	PH3 valve closed
12/24/2010	2:22:11 PM	SiCl4 pre valve closed
12/24/2010	2:22:11 PM	SiCl4 post valve closed
12/24/2010	2:22:11 PM	Bubbler valve closed
12/24/2010	2:22:11 PM	Helium valve opened
12/24/2010	2:22:11 PM	Main Vac valve opened
12/24/2010	2:22:11 PM	Bypass valve opened
12/24/2010	2:22:11 PM	Helium MFC set to  100.000000
12/24/2010	2:22:11 PM	H2 MFC set to  0.000000
12/24/2010	2:22:11 PM	BCl3 MFC set to  0.000000
12/24/2010	2:22:11 PM	PHl3 MFC set to  0.000000
12/24/2010	2:22:11 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:22:11 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:22:11 PM	Tube furnace set to 0
12/24/2010	2:23:11 PM	Helium valve closed
12/24/2010	2:23:11 PM	H2 valve closed
12/24/2010	2:23:11 PM	BCl3 valve closed
12/24/2010	2:23:11 PM	PH3 valve closed
12/24/2010	2:23:11 PM	SiCl4 pre valve closed
12/24/2010	2:23:11 PM	SiCl4 post valve closed
12/24/2010	2:23:11 PM	Bubbler valve closed
12/24/2010	2:23:11 PM	Main Vac valve opened
12/24/2010	2:23:11 PM	Bypass valve opened
12/24/2010	2:23:11 PM	Helium MFC set to  0.000000
12/24/2010	2:23:11 PM	H2 MFC set to  0.000000
12/24/2010	2:23:11 PM	BCl3 MFC set to  0.000000
12/24/2010	2:23:11 PM	PHl3 MFC set to  0.000000
12/24/2010	2:23:11 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:23:11 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:23:12 PM	Tube furnace set to 0
12/24/2010	2:24:12 PM	H2 valve closed
12/24/2010	2:24:12 PM	BCl3 valve closed
12/24/2010	2:24:12 PM	PH3 valve closed
12/24/2010	2:24:12 PM	SiCl4 pre valve closed
12/24/2010	2:24:12 PM	SiCl4 post valve closed
12/24/2010	2:24:12 PM	Bubbler valve closed
12/24/2010	2:24:12 PM	Helium valve opened
12/24/2010	2:24:12 PM	Main Vac valve opened
12/24/2010	2:24:12 PM	Bypass valve opened
12/24/2010	2:24:12 PM	Helium MFC set to  100.000000
12/24/2010	2:24:12 PM	H2 MFC set to  0.000000
12/24/2010	2:24:12 PM	BCl3 MFC set to  0.000000
12/24/2010	2:24:12 PM	PHl3 MFC set to  0.000000
12/24/2010	2:24:12 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:24:12 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:24:12 PM	Tube furnace set to 0
12/24/2010	2:25:12 PM	Helium valve closed
12/24/2010	2:25:12 PM	H2 valve closed
12/24/2010	2:25:12 PM	BCl3 valve closed
12/24/2010	2:25:12 PM	PH3 valve closed
12/24/2010	2:25:12 PM	SiCl4 pre valve closed
12/24/2010	2:25:12 PM	SiCl4 post valve closed
12/24/2010	2:25:12 PM	Bubbler valve closed
12/24/2010	2:25:12 PM	Main Vac valve opened
12/24/2010	2:25:12 PM	Bypass valve opened
12/24/2010	2:25:12 PM	Helium MFC set to  0.000000
12/24/2010	2:25:12 PM	H2 MFC set to  0.000000
12/24/2010	2:25:12 PM	BCl3 MFC set to  0.000000
12/24/2010	2:25:12 PM	PHl3 MFC set to  0.000000
12/24/2010	2:25:12 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:25:12 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:25:12 PM	Tube furnace set to 0
12/24/2010	2:26:12 PM	H2 valve closed
12/24/2010	2:26:12 PM	BCl3 valve closed
12/24/2010	2:26:12 PM	PH3 valve closed
12/24/2010	2:26:12 PM	SiCl4 pre valve closed
12/24/2010	2:26:12 PM	SiCl4 post valve closed
12/24/2010	2:26:12 PM	Bubbler valve closed
12/24/2010	2:26:12 PM	Helium valve opened
12/24/2010	2:26:12 PM	Main Vac valve opened
12/24/2010	2:26:12 PM	Bypass valve opened
12/24/2010	2:26:12 PM	Helium MFC set to  100.000000
12/24/2010	2:26:12 PM	H2 MFC set to  0.000000
12/24/2010	2:26:12 PM	BCl3 MFC set to  0.000000
12/24/2010	2:26:12 PM	PHl3 MFC set to  0.000000
12/24/2010	2:26:12 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:26:12 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:26:12 PM	Tube furnace set to 0
12/24/2010	2:26:51 PM	Run aborted at 2:26 PM
12/24/2010	2:26:51 PM	Helium valve closed
12/24/2010	2:26:51 PM	H2 valve closed
12/24/2010	2:26:51 PM	BCl3 valve closed
12/24/2010	2:26:51 PM	PH3 valve closed
12/24/2010	2:26:51 PM	SiCl4 pre valve closed
12/24/2010	2:26:51 PM	SiCl4 post valve closed
12/24/2010	2:26:51 PM	Bypass valve closed
12/24/2010	2:26:51 PM	Main Vac valve closed
12/24/2010	2:26:51 PM	Bubbler valve closed
12/24/2010	2:26:51 PM	Helium MFC set to  0.000000
12/24/2010	2:26:51 PM	H2 MFC set to  0.000000
12/24/2010	2:26:51 PM	BCl3 MFC set to  0.000000
12/24/2010	2:26:51 PM	PHl3 MFC set to  0.000000
12/24/2010	2:26:51 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:26:52 PM	Tube furnace set to 0
12/24/2010	2:26:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/24/2010	2:26:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/24/2010	2:26:53 PM	Recipe started at 2:26 PM
12/24/2010	2:26:53 PM	Helium valve closed
12/24/2010	2:26:53 PM	H2 valve closed
12/24/2010	2:26:53 PM	BCl3 valve closed
12/24/2010	2:26:53 PM	PH3 valve closed
12/24/2010	2:26:53 PM	SiCl4 pre valve closed
12/24/2010	2:26:53 PM	SiCl4 post valve closed
12/24/2010	2:26:53 PM	Main Vac valve closed
12/24/2010	2:26:53 PM	Bubbler valve closed
12/24/2010	2:26:53 PM	Bypass valve opened
12/24/2010	2:26:53 PM	Helium MFC set to  0.000000
12/24/2010	2:26:53 PM	H2 MFC set to  0.000000
12/24/2010	2:26:53 PM	BCl3 MFC set to  0.000000
12/24/2010	2:26:53 PM	PHl3 MFC set to  0.000000
12/24/2010	2:26:53 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:26:53 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:26:53 PM	Tube furnace set to 0
12/24/2010	2:26:54 PM	Helium valve closed
12/24/2010	2:26:54 PM	H2 valve closed
12/24/2010	2:26:54 PM	BCl3 valve closed
12/24/2010	2:26:54 PM	PH3 valve closed
12/24/2010	2:26:54 PM	SiCl4 pre valve closed
12/24/2010	2:26:54 PM	SiCl4 post valve closed
12/24/2010	2:26:54 PM	Bubbler valve closed
12/24/2010	2:26:54 PM	Main Vac valve opened
12/24/2010	2:26:54 PM	Bypass valve opened
12/24/2010	2:26:54 PM	Helium MFC set to  0.000000
12/24/2010	2:26:54 PM	H2 MFC set to  0.000000
12/24/2010	2:26:54 PM	BCl3 MFC set to  0.000000
12/24/2010	2:26:54 PM	PHl3 MFC set to  0.000000
12/24/2010	2:26:54 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:26:54 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:26:54 PM	Tube furnace set to 0
12/24/2010	2:26:54 PM	Run finished at 2:26 PM
12/24/2010	2:26:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/24/2010	2:27:38 PM	Recipe started at 2:27 PM
12/24/2010	2:27:38 PM	Helium valve closed
12/24/2010	2:27:38 PM	BCl3 valve closed
12/24/2010	2:27:38 PM	PH3 valve closed
12/24/2010	2:27:38 PM	SiCl4 pre valve closed
12/24/2010	2:27:38 PM	SiCl4 post valve closed
12/24/2010	2:27:38 PM	Main Vac valve closed
12/24/2010	2:27:38 PM	Bypass valve closed
12/24/2010	2:27:38 PM	Bubbler valve closed
12/24/2010	2:27:38 PM	H2 valve opened
12/24/2010	2:27:38 PM	Helium MFC set to  0.000000
12/24/2010	2:27:38 PM	H2 MFC set to  500.000000
12/24/2010	2:27:38 PM	BCl3 MFC set to  0.000000
12/24/2010	2:27:38 PM	PHl3 MFC set to  0.000000
12/24/2010	2:27:38 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:27:38 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:27:38 PM	Tube furnace set to 0
12/24/2010	2:28:56 PM	Helium valve closed
12/24/2010	2:28:56 PM	BCl3 valve closed
12/24/2010	2:28:56 PM	PH3 valve closed
12/24/2010	2:28:56 PM	SiCl4 pre valve closed
12/24/2010	2:28:56 PM	SiCl4 post valve closed
12/24/2010	2:28:56 PM	Main Vac valve closed
12/24/2010	2:28:56 PM	Bypass valve closed
12/24/2010	2:28:56 PM	H2 valve opened
12/24/2010	2:28:56 PM	Bubbler valve opened
12/24/2010	2:28:56 PM	Helium MFC set to  0.000000
12/24/2010	2:28:56 PM	H2 MFC set to  500.000000
12/24/2010	2:28:56 PM	BCl3 MFC set to  0.000000
12/24/2010	2:28:56 PM	PHl3 MFC set to  0.000000
12/24/2010	2:28:56 PM	SiCl4 MFC set to  0.000000
12/24/2010	2:28:56 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:28:56 PM	Tube furnace set to 1000
12/24/2010	2:48:56 PM	Helium valve closed
12/24/2010	2:48:56 PM	PH3 valve closed
12/24/2010	2:48:56 PM	Main Vac valve closed
12/24/2010	2:48:56 PM	Bypass valve closed
12/24/2010	2:48:56 PM	H2 valve opened
12/24/2010	2:48:56 PM	BCl3 valve opened
12/24/2010	2:48:56 PM	SiCl4 pre valve opened
12/24/2010	2:48:56 PM	SiCl4 post valve opened
12/24/2010	2:48:56 PM	Bubbler valve opened
12/24/2010	2:48:56 PM	Helium MFC set to  0.000000
12/24/2010	2:48:56 PM	H2 MFC set to  500.000000
12/24/2010	2:48:56 PM	BCl3 MFC set to  12.000000
12/24/2010	2:48:56 PM	PHl3 MFC set to  0.000000
12/24/2010	2:48:56 PM	SiCl4 MFC set to  50.000000
12/24/2010	2:48:56 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	2:48:56 PM	Tube furnace set to 1000
12/24/2010	3:08:56 PM	H2 valve closed
12/24/2010	3:08:56 PM	BCl3 valve closed
12/24/2010	3:08:56 PM	PH3 valve closed
12/24/2010	3:08:56 PM	SiCl4 pre valve closed
12/24/2010	3:08:56 PM	SiCl4 post valve closed
12/24/2010	3:08:56 PM	Main Vac valve closed
12/24/2010	3:08:56 PM	Bypass valve closed
12/24/2010	3:08:56 PM	Helium valve opened
12/24/2010	3:08:56 PM	Bubbler valve opened
12/24/2010	3:08:56 PM	Helium MFC set to  500.000000
12/24/2010	3:08:56 PM	H2 MFC set to  0.000000
12/24/2010	3:08:56 PM	BCl3 MFC set to  0.000000
12/24/2010	3:08:56 PM	PHl3 MFC set to  0.000000
12/24/2010	3:08:56 PM	SiCl4 MFC set to  0.000000
12/24/2010	3:08:56 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	3:08:56 PM	Tube furnace set to 0
12/24/2010	3:28:56 PM	Helium valve closed
12/24/2010	3:28:56 PM	H2 valve closed
12/24/2010	3:28:56 PM	BCl3 valve closed
12/24/2010	3:28:56 PM	PH3 valve closed
12/24/2010	3:28:56 PM	SiCl4 pre valve closed
12/24/2010	3:28:56 PM	SiCl4 post valve closed
12/24/2010	3:28:56 PM	Main Vac valve closed
12/24/2010	3:28:56 PM	Bypass valve closed
12/24/2010	3:28:56 PM	Bubbler valve closed
12/24/2010	3:28:56 PM	Helium MFC set to  0.000000
12/24/2010	3:28:56 PM	H2 MFC set to  0.000000
12/24/2010	3:28:56 PM	BCl3 MFC set to  0.000000
12/24/2010	3:28:56 PM	PHl3 MFC set to  0.000000
12/24/2010	3:28:56 PM	SiCl4 MFC set to  0.000000
12/24/2010	3:28:56 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	3:28:57 PM	Tube furnace set to 0
12/24/2010	3:28:57 PM	Run finished at 3:28 PM
12/24/2010	3:48:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/24/2010	3:48:34 PM	Recipe started at 3:48 PM
12/24/2010	3:48:34 PM	Helium valve closed
12/24/2010	3:48:34 PM	H2 valve closed
12/24/2010	3:48:34 PM	BCl3 valve closed
12/24/2010	3:48:34 PM	PH3 valve closed
12/24/2010	3:48:34 PM	SiCl4 pre valve closed
12/24/2010	3:48:34 PM	SiCl4 post valve closed
12/24/2010	3:48:34 PM	Main Vac valve closed
12/24/2010	3:48:34 PM	Bubbler valve closed
12/24/2010	3:48:34 PM	Bypass valve opened
12/24/2010	3:48:34 PM	Helium MFC set to  0.000000
12/24/2010	3:48:34 PM	H2 MFC set to  0.000000
12/24/2010	3:48:34 PM	BCl3 MFC set to  0.000000
12/24/2010	3:48:34 PM	PHl3 MFC set to  0.000000
12/24/2010	3:48:34 PM	SiCl4 MFC set to  0.000000
12/24/2010	3:48:34 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	3:48:34 PM	Tube furnace set to 0
12/24/2010	3:49:32 PM	Helium valve closed
12/24/2010	3:49:32 PM	H2 valve closed
12/24/2010	3:49:32 PM	BCl3 valve closed
12/24/2010	3:49:32 PM	PH3 valve closed
12/24/2010	3:49:32 PM	SiCl4 pre valve closed
12/24/2010	3:49:32 PM	SiCl4 post valve closed
12/24/2010	3:49:32 PM	Bubbler valve closed
12/24/2010	3:49:32 PM	Main Vac valve opened
12/24/2010	3:49:32 PM	Bypass valve opened
12/24/2010	3:49:32 PM	Helium MFC set to  0.000000
12/24/2010	3:49:32 PM	H2 MFC set to  0.000000
12/24/2010	3:49:32 PM	BCl3 MFC set to  0.000000
12/24/2010	3:49:32 PM	PHl3 MFC set to  0.000000
12/24/2010	3:49:32 PM	SiCl4 MFC set to  0.000000
12/24/2010	3:49:32 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	3:49:32 PM	Tube furnace set to 0
12/24/2010	3:49:32 PM	Run finished at 3:49 PM
12/24/2010	3:49:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/24/2010	3:49:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/24/2010	3:50:05 PM	Recipe started at 3:49 PM
12/24/2010	3:50:05 PM	Helium valve closed
12/24/2010	3:50:05 PM	H2 valve closed
12/24/2010	3:50:05 PM	BCl3 valve closed
12/24/2010	3:50:05 PM	PH3 valve closed
12/24/2010	3:50:05 PM	SiCl4 pre valve closed
12/24/2010	3:50:05 PM	SiCl4 post valve closed
12/24/2010	3:50:05 PM	Main Vac valve closed
12/24/2010	3:50:05 PM	Bubbler valve closed
12/24/2010	3:50:05 PM	Bypass valve opened
12/24/2010	3:50:05 PM	Helium MFC set to  0.000000
12/24/2010	3:50:05 PM	H2 MFC set to  0.000000
12/24/2010	3:50:05 PM	BCl3 MFC set to  0.000000
12/24/2010	3:50:05 PM	PHl3 MFC set to  0.000000
12/24/2010	3:50:05 PM	SiCl4 MFC set to  0.000000
12/24/2010	3:50:05 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	3:50:05 PM	Tube furnace set to 0
12/24/2010	3:50:05 PM	Helium valve closed
12/24/2010	3:50:05 PM	H2 valve closed
12/24/2010	3:50:05 PM	BCl3 valve closed
12/24/2010	3:50:05 PM	PH3 valve closed
12/24/2010	3:50:05 PM	SiCl4 pre valve closed
12/24/2010	3:50:05 PM	SiCl4 post valve closed
12/24/2010	3:50:05 PM	Bubbler valve closed
12/24/2010	3:50:05 PM	Main Vac valve opened
12/24/2010	3:50:05 PM	Bypass valve opened
12/24/2010	3:50:05 PM	Helium MFC set to  0.000000
12/24/2010	3:50:05 PM	H2 MFC set to  0.000000
12/24/2010	3:50:05 PM	BCl3 MFC set to  0.000000
12/24/2010	3:50:05 PM	PHl3 MFC set to  0.000000
12/24/2010	3:50:05 PM	SiCl4 MFC set to  0.000000
12/24/2010	3:50:05 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	3:50:05 PM	Tube furnace set to 0
12/24/2010	3:51:05 PM	H2 valve closed
12/24/2010	3:51:05 PM	BCl3 valve closed
12/24/2010	3:51:05 PM	PH3 valve closed
12/24/2010	3:51:05 PM	SiCl4 pre valve closed
12/24/2010	3:51:05 PM	SiCl4 post valve closed
12/24/2010	3:51:05 PM	Bubbler valve closed
12/24/2010	3:51:05 PM	Helium valve opened
12/24/2010	3:51:05 PM	Main Vac valve opened
12/24/2010	3:51:05 PM	Bypass valve opened
12/24/2010	3:51:05 PM	Helium MFC set to  100.000000
12/24/2010	3:51:05 PM	H2 MFC set to  0.000000
12/24/2010	3:51:05 PM	BCl3 MFC set to  0.000000
12/24/2010	3:51:05 PM	PHl3 MFC set to  0.000000
12/24/2010	3:51:05 PM	SiCl4 MFC set to  0.000000
12/24/2010	3:51:05 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	3:51:06 PM	Tube furnace set to 0
12/24/2010	3:52:06 PM	Helium valve closed
12/24/2010	3:52:06 PM	H2 valve closed
12/24/2010	3:52:06 PM	BCl3 valve closed
12/24/2010	3:52:06 PM	PH3 valve closed
12/24/2010	3:52:06 PM	SiCl4 pre valve closed
12/24/2010	3:52:06 PM	SiCl4 post valve closed
12/24/2010	3:52:06 PM	Bubbler valve closed
12/24/2010	3:52:06 PM	Main Vac valve opened
12/24/2010	3:52:06 PM	Bypass valve opened
12/24/2010	3:52:06 PM	Helium MFC set to  0.000000
12/24/2010	3:52:06 PM	H2 MFC set to  0.000000
12/24/2010	3:52:06 PM	BCl3 MFC set to  0.000000
12/24/2010	3:52:06 PM	PHl3 MFC set to  0.000000
12/24/2010	3:52:06 PM	SiCl4 MFC set to  0.000000
12/24/2010	3:52:06 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	3:52:06 PM	Tube furnace set to 0
12/24/2010	3:53:06 PM	H2 valve closed
12/24/2010	3:53:06 PM	BCl3 valve closed
12/24/2010	3:53:06 PM	PH3 valve closed
12/24/2010	3:53:06 PM	SiCl4 pre valve closed
12/24/2010	3:53:06 PM	SiCl4 post valve closed
12/24/2010	3:53:06 PM	Bubbler valve closed
12/24/2010	3:53:06 PM	Helium valve opened
12/24/2010	3:53:06 PM	Main Vac valve opened
12/24/2010	3:53:06 PM	Bypass valve opened
12/24/2010	3:53:06 PM	Helium MFC set to  100.000000
12/24/2010	3:53:06 PM	H2 MFC set to  0.000000
12/24/2010	3:53:06 PM	BCl3 MFC set to  0.000000
12/24/2010	3:53:06 PM	PHl3 MFC set to  0.000000
12/24/2010	3:53:06 PM	SiCl4 MFC set to  0.000000
12/24/2010	3:53:06 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	3:53:06 PM	Tube furnace set to 0
12/24/2010	3:54:06 PM	Helium valve closed
12/24/2010	3:54:06 PM	H2 valve closed
12/24/2010	3:54:06 PM	BCl3 valve closed
12/24/2010	3:54:06 PM	PH3 valve closed
12/24/2010	3:54:06 PM	SiCl4 pre valve closed
12/24/2010	3:54:06 PM	SiCl4 post valve closed
12/24/2010	3:54:06 PM	Bubbler valve closed
12/24/2010	3:54:06 PM	Main Vac valve opened
12/24/2010	3:54:06 PM	Bypass valve opened
12/24/2010	3:54:06 PM	Helium MFC set to  0.000000
12/24/2010	3:54:06 PM	H2 MFC set to  0.000000
12/24/2010	3:54:06 PM	BCl3 MFC set to  0.000000
12/24/2010	3:54:06 PM	PHl3 MFC set to  0.000000
12/24/2010	3:54:06 PM	SiCl4 MFC set to  0.000000
12/24/2010	3:54:06 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	3:54:06 PM	Tube furnace set to 0
12/24/2010	3:55:06 PM	H2 valve closed
12/24/2010	3:55:06 PM	BCl3 valve closed
12/24/2010	3:55:06 PM	PH3 valve closed
12/24/2010	3:55:06 PM	SiCl4 pre valve closed
12/24/2010	3:55:06 PM	SiCl4 post valve closed
12/24/2010	3:55:06 PM	Bubbler valve closed
12/24/2010	3:55:06 PM	Helium valve opened
12/24/2010	3:55:06 PM	Main Vac valve opened
12/24/2010	3:55:06 PM	Bypass valve opened
12/24/2010	3:55:06 PM	Helium MFC set to  100.000000
12/24/2010	3:55:06 PM	H2 MFC set to  0.000000
12/24/2010	3:55:06 PM	BCl3 MFC set to  0.000000
12/24/2010	3:55:06 PM	PHl3 MFC set to  0.000000
12/24/2010	3:55:06 PM	SiCl4 MFC set to  0.000000
12/24/2010	3:55:06 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	3:55:06 PM	Tube furnace set to 0
12/24/2010	3:56:06 PM	Helium valve closed
12/24/2010	3:56:06 PM	H2 valve closed
12/24/2010	3:56:06 PM	BCl3 valve closed
12/24/2010	3:56:06 PM	PH3 valve closed
12/24/2010	3:56:06 PM	SiCl4 pre valve closed
12/24/2010	3:56:06 PM	SiCl4 post valve closed
12/24/2010	3:56:06 PM	Bubbler valve closed
12/24/2010	3:56:06 PM	Main Vac valve opened
12/24/2010	3:56:06 PM	Bypass valve opened
12/24/2010	3:56:06 PM	Helium MFC set to  0.000000
12/24/2010	3:56:06 PM	H2 MFC set to  0.000000
12/24/2010	3:56:06 PM	BCl3 MFC set to  0.000000
12/24/2010	3:56:06 PM	PHl3 MFC set to  0.000000
12/24/2010	3:56:06 PM	SiCl4 MFC set to  0.000000
12/24/2010	3:56:06 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	3:56:07 PM	Tube furnace set to 0
12/24/2010	3:57:07 PM	H2 valve closed
12/24/2010	3:57:07 PM	BCl3 valve closed
12/24/2010	3:57:07 PM	PH3 valve closed
12/24/2010	3:57:07 PM	SiCl4 pre valve closed
12/24/2010	3:57:07 PM	SiCl4 post valve closed
12/24/2010	3:57:07 PM	Bubbler valve closed
12/24/2010	3:57:07 PM	Helium valve opened
12/24/2010	3:57:07 PM	Main Vac valve opened
12/24/2010	3:57:07 PM	Bypass valve opened
12/24/2010	3:57:07 PM	Helium MFC set to  100.000000
12/24/2010	3:57:07 PM	H2 MFC set to  0.000000
12/24/2010	3:57:07 PM	BCl3 MFC set to  0.000000
12/24/2010	3:57:07 PM	PHl3 MFC set to  0.000000
12/24/2010	3:57:07 PM	SiCl4 MFC set to  0.000000
12/24/2010	3:57:07 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	3:57:07 PM	Tube furnace set to 0
12/24/2010	3:58:07 PM	Helium valve closed
12/24/2010	3:58:07 PM	H2 valve closed
12/24/2010	3:58:07 PM	BCl3 valve closed
12/24/2010	3:58:07 PM	PH3 valve closed
12/24/2010	3:58:07 PM	SiCl4 pre valve closed
12/24/2010	3:58:07 PM	SiCl4 post valve closed
12/24/2010	3:58:07 PM	Bubbler valve closed
12/24/2010	3:58:07 PM	Main Vac valve opened
12/24/2010	3:58:07 PM	Bypass valve opened
12/24/2010	3:58:07 PM	Helium MFC set to  0.000000
12/24/2010	3:58:07 PM	H2 MFC set to  0.000000
12/24/2010	3:58:07 PM	BCl3 MFC set to  0.000000
12/24/2010	3:58:07 PM	PHl3 MFC set to  0.000000
12/24/2010	3:58:07 PM	SiCl4 MFC set to  0.000000
12/24/2010	3:58:07 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	3:58:07 PM	Tube furnace set to 0
12/24/2010	3:59:07 PM	H2 valve closed
12/24/2010	3:59:07 PM	BCl3 valve closed
12/24/2010	3:59:07 PM	PH3 valve closed
12/24/2010	3:59:07 PM	SiCl4 pre valve closed
12/24/2010	3:59:07 PM	SiCl4 post valve closed
12/24/2010	3:59:07 PM	Bubbler valve closed
12/24/2010	3:59:07 PM	Helium valve opened
12/24/2010	3:59:07 PM	Main Vac valve opened
12/24/2010	3:59:07 PM	Bypass valve opened
12/24/2010	3:59:07 PM	Helium MFC set to  100.000000
12/24/2010	3:59:07 PM	H2 MFC set to  0.000000
12/24/2010	3:59:07 PM	BCl3 MFC set to  0.000000
12/24/2010	3:59:07 PM	PHl3 MFC set to  0.000000
12/24/2010	3:59:07 PM	SiCl4 MFC set to  0.000000
12/24/2010	3:59:07 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	3:59:07 PM	Tube furnace set to 0
12/24/2010	4:00:07 PM	Helium valve closed
12/24/2010	4:00:07 PM	H2 valve closed
12/24/2010	4:00:07 PM	BCl3 valve closed
12/24/2010	4:00:07 PM	PH3 valve closed
12/24/2010	4:00:07 PM	SiCl4 pre valve closed
12/24/2010	4:00:07 PM	SiCl4 post valve closed
12/24/2010	4:00:07 PM	Bubbler valve closed
12/24/2010	4:00:07 PM	Main Vac valve opened
12/24/2010	4:00:07 PM	Bypass valve opened
12/24/2010	4:00:07 PM	Helium MFC set to  0.000000
12/24/2010	4:00:07 PM	H2 MFC set to  0.000000
12/24/2010	4:00:07 PM	BCl3 MFC set to  0.000000
12/24/2010	4:00:07 PM	PHl3 MFC set to  0.000000
12/24/2010	4:00:07 PM	SiCl4 MFC set to  0.000000
12/24/2010	4:00:07 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	4:00:07 PM	Tube furnace set to 0
12/24/2010	4:01:07 PM	H2 valve closed
12/24/2010	4:01:07 PM	BCl3 valve closed
12/24/2010	4:01:07 PM	PH3 valve closed
12/24/2010	4:01:07 PM	SiCl4 pre valve closed
12/24/2010	4:01:07 PM	SiCl4 post valve closed
12/24/2010	4:01:07 PM	Bubbler valve closed
12/24/2010	4:01:07 PM	Helium valve opened
12/24/2010	4:01:07 PM	Main Vac valve opened
12/24/2010	4:01:07 PM	Bypass valve opened
12/24/2010	4:01:07 PM	Helium MFC set to  100.000000
12/24/2010	4:01:07 PM	H2 MFC set to  0.000000
12/24/2010	4:01:07 PM	BCl3 MFC set to  0.000000
12/24/2010	4:01:07 PM	PHl3 MFC set to  0.000000
12/24/2010	4:01:07 PM	SiCl4 MFC set to  0.000000
12/24/2010	4:01:07 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	4:01:08 PM	Tube furnace set to 0
12/24/2010	4:02:08 PM	Helium valve closed
12/24/2010	4:02:08 PM	H2 valve closed
12/24/2010	4:02:08 PM	BCl3 valve closed
12/24/2010	4:02:08 PM	PH3 valve closed
12/24/2010	4:02:08 PM	SiCl4 pre valve closed
12/24/2010	4:02:08 PM	SiCl4 post valve closed
12/24/2010	4:02:08 PM	Bubbler valve closed
12/24/2010	4:02:08 PM	Main Vac valve opened
12/24/2010	4:02:08 PM	Bypass valve opened
12/24/2010	4:02:08 PM	Helium MFC set to  0.000000
12/24/2010	4:02:08 PM	H2 MFC set to  0.000000
12/24/2010	4:02:08 PM	BCl3 MFC set to  0.000000
12/24/2010	4:02:08 PM	PHl3 MFC set to  0.000000
12/24/2010	4:02:08 PM	SiCl4 MFC set to  0.000000
12/24/2010	4:02:08 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	4:02:08 PM	Tube furnace set to 0
12/24/2010	4:03:08 PM	H2 valve closed
12/24/2010	4:03:08 PM	BCl3 valve closed
12/24/2010	4:03:08 PM	PH3 valve closed
12/24/2010	4:03:08 PM	SiCl4 pre valve closed
12/24/2010	4:03:08 PM	SiCl4 post valve closed
12/24/2010	4:03:08 PM	Bubbler valve closed
12/24/2010	4:03:08 PM	Helium valve opened
12/24/2010	4:03:08 PM	Main Vac valve opened
12/24/2010	4:03:08 PM	Bypass valve opened
12/24/2010	4:03:08 PM	Helium MFC set to  100.000000
12/24/2010	4:03:08 PM	H2 MFC set to  0.000000
12/24/2010	4:03:08 PM	BCl3 MFC set to  0.000000
12/24/2010	4:03:08 PM	PHl3 MFC set to  0.000000
12/24/2010	4:03:08 PM	SiCl4 MFC set to  0.000000
12/24/2010	4:03:08 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	4:03:08 PM	Tube furnace set to 0
12/24/2010	4:04:08 PM	Helium valve closed
12/24/2010	4:04:08 PM	H2 valve closed
12/24/2010	4:04:08 PM	BCl3 valve closed
12/24/2010	4:04:08 PM	PH3 valve closed
12/24/2010	4:04:08 PM	SiCl4 pre valve closed
12/24/2010	4:04:08 PM	SiCl4 post valve closed
12/24/2010	4:04:08 PM	Bubbler valve closed
12/24/2010	4:04:08 PM	Main Vac valve opened
12/24/2010	4:04:08 PM	Bypass valve opened
12/24/2010	4:04:08 PM	Helium MFC set to  0.000000
12/24/2010	4:04:08 PM	H2 MFC set to  0.000000
12/24/2010	4:04:08 PM	BCl3 MFC set to  0.000000
12/24/2010	4:04:08 PM	PHl3 MFC set to  0.000000
12/24/2010	4:04:08 PM	SiCl4 MFC set to  0.000000
12/24/2010	4:04:08 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	4:04:08 PM	Tube furnace set to 0
12/24/2010	4:05:08 PM	H2 valve closed
12/24/2010	4:05:08 PM	BCl3 valve closed
12/24/2010	4:05:08 PM	PH3 valve closed
12/24/2010	4:05:08 PM	SiCl4 pre valve closed
12/24/2010	4:05:08 PM	SiCl4 post valve closed
12/24/2010	4:05:08 PM	Bubbler valve closed
12/24/2010	4:05:08 PM	Helium valve opened
12/24/2010	4:05:08 PM	Main Vac valve opened
12/24/2010	4:05:08 PM	Bypass valve opened
12/24/2010	4:05:08 PM	Helium MFC set to  100.000000
12/24/2010	4:05:08 PM	H2 MFC set to  0.000000
12/24/2010	4:05:08 PM	BCl3 MFC set to  0.000000
12/24/2010	4:05:08 PM	PHl3 MFC set to  0.000000
12/24/2010	4:05:08 PM	SiCl4 MFC set to  0.000000
12/24/2010	4:05:08 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	4:05:08 PM	Tube furnace set to 0
12/24/2010	4:06:08 PM	Helium valve closed
12/24/2010	4:06:08 PM	H2 valve closed
12/24/2010	4:06:08 PM	BCl3 valve closed
12/24/2010	4:06:08 PM	PH3 valve closed
12/24/2010	4:06:08 PM	SiCl4 pre valve closed
12/24/2010	4:06:08 PM	SiCl4 post valve closed
12/24/2010	4:06:08 PM	Bubbler valve closed
12/24/2010	4:06:08 PM	Main Vac valve opened
12/24/2010	4:06:08 PM	Bypass valve opened
12/24/2010	4:06:08 PM	Helium MFC set to  0.000000
12/24/2010	4:06:08 PM	H2 MFC set to  0.000000
12/24/2010	4:06:08 PM	BCl3 MFC set to  0.000000
12/24/2010	4:06:08 PM	PHl3 MFC set to  0.000000
12/24/2010	4:06:08 PM	SiCl4 MFC set to  0.000000
12/24/2010	4:06:08 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	4:06:09 PM	Tube furnace set to 0
12/24/2010	4:07:09 PM	H2 valve closed
12/24/2010	4:07:09 PM	BCl3 valve closed
12/24/2010	4:07:09 PM	PH3 valve closed
12/24/2010	4:07:09 PM	SiCl4 pre valve closed
12/24/2010	4:07:09 PM	SiCl4 post valve closed
12/24/2010	4:07:09 PM	Bubbler valve closed
12/24/2010	4:07:09 PM	Helium valve opened
12/24/2010	4:07:09 PM	Main Vac valve opened
12/24/2010	4:07:09 PM	Bypass valve opened
12/24/2010	4:07:09 PM	Helium MFC set to  100.000000
12/24/2010	4:07:09 PM	H2 MFC set to  0.000000
12/24/2010	4:07:09 PM	BCl3 MFC set to  0.000000
12/24/2010	4:07:09 PM	PHl3 MFC set to  0.000000
12/24/2010	4:07:09 PM	SiCl4 MFC set to  0.000000
12/24/2010	4:07:09 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	4:07:09 PM	Tube furnace set to 0
12/24/2010	4:08:09 PM	Helium valve closed
12/24/2010	4:08:09 PM	H2 valve closed
12/24/2010	4:08:09 PM	BCl3 valve closed
12/24/2010	4:08:09 PM	PH3 valve closed
12/24/2010	4:08:09 PM	SiCl4 pre valve closed
12/24/2010	4:08:09 PM	SiCl4 post valve closed
12/24/2010	4:08:09 PM	Bubbler valve closed
12/24/2010	4:08:09 PM	Main Vac valve opened
12/24/2010	4:08:09 PM	Bypass valve opened
12/24/2010	4:08:09 PM	Helium MFC set to  0.000000
12/24/2010	4:08:09 PM	H2 MFC set to  0.000000
12/24/2010	4:08:09 PM	BCl3 MFC set to  0.000000
12/24/2010	4:08:09 PM	PHl3 MFC set to  0.000000
12/24/2010	4:08:09 PM	SiCl4 MFC set to  0.000000
12/24/2010	4:08:09 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	4:08:09 PM	Tube furnace set to 0
12/24/2010	4:09:09 PM	H2 valve closed
12/24/2010	4:09:09 PM	BCl3 valve closed
12/24/2010	4:09:09 PM	PH3 valve closed
12/24/2010	4:09:09 PM	SiCl4 pre valve closed
12/24/2010	4:09:09 PM	SiCl4 post valve closed
12/24/2010	4:09:09 PM	Bubbler valve closed
12/24/2010	4:09:09 PM	Helium valve opened
12/24/2010	4:09:09 PM	Main Vac valve opened
12/24/2010	4:09:09 PM	Bypass valve opened
12/24/2010	4:09:09 PM	Helium MFC set to  100.000000
12/24/2010	4:09:09 PM	H2 MFC set to  0.000000
12/24/2010	4:09:09 PM	BCl3 MFC set to  0.000000
12/24/2010	4:09:09 PM	PHl3 MFC set to  0.000000
12/24/2010	4:09:09 PM	SiCl4 MFC set to  0.000000
12/24/2010	4:09:09 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	4:09:09 PM	Tube furnace set to 0
12/24/2010	4:10:09 PM	Helium valve closed
12/24/2010	4:10:09 PM	H2 valve closed
12/24/2010	4:10:09 PM	BCl3 valve closed
12/24/2010	4:10:09 PM	PH3 valve closed
12/24/2010	4:10:09 PM	SiCl4 pre valve closed
12/24/2010	4:10:09 PM	SiCl4 post valve closed
12/24/2010	4:10:09 PM	Bubbler valve closed
12/24/2010	4:10:09 PM	Main Vac valve opened
12/24/2010	4:10:09 PM	Bypass valve opened
12/24/2010	4:10:09 PM	Helium MFC set to  0.000000
12/24/2010	4:10:09 PM	H2 MFC set to  0.000000
12/24/2010	4:10:09 PM	BCl3 MFC set to  0.000000
12/24/2010	4:10:09 PM	PHl3 MFC set to  0.000000
12/24/2010	4:10:09 PM	SiCl4 MFC set to  0.000000
12/24/2010	4:10:09 PM	Bypass solenoid MFC set to  0.000000
12/24/2010	4:10:10 PM	Tube furnace set to 0
12/24/2010	4:10:11 PM	Run finished at 4:10 PM
12/24/2010	4:10:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
